Mr. Sanghyun Son Profile

Sanghyun Son

at SEMES Co Ltd

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Publications (1)

Proceedings Article | 10 August 2023 Poster

Optical reflectometry-based high-speed temperature change measurement of silicon wafer surfaces

Jinho Bae, Minji Hyun, Jinhee Hong, Youngeun Jeon, Sanghyun Son, Yongjun Seo, Sangmin Ha, Jungwon Kim

Proceedings Volume 12618, 1261827 (2023) https://doi.org/10.1117/12.2673346

KEYWORDS: Temperature metrology, Reflectivity, Calibration, Ultrafast phenomena, Silicon, Semiconducting wafers, Temporal resolution, Wafer-level optics, Reflection, Optical surfaces

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