Dr. Sebastian Döring Profile

Dr. Sebastian Döring

at Fraunhofer Institut fur Photonische Mikrosysteme

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Publications (2)

Proceedings Article | 5 March 2021 Presentation + Paper

Challenges of monolithic MEMS-on-CMOS integration for spatial light modulators

Christoph Hohle, Sebastian Döring, Martin Friedrichs, Andreas Gehner, Dirk Rudloff, Matthias Schulze, Ronald Stübner, Daniela Trenkler

Proceedings Volume 11697, 116970V (2021) https://doi.org/10.1117/12.2583036

KEYWORDS: Microelectromechanical systems, Spatial light modulators, Semiconducting wafers, Mirrors, Lithography, Wafer-level optics, System on a chip, Surface micromachining, Optical lithography, Microopto electromechanical systems

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Proceedings Article | 28 February 2020 Paper

Novel CMOS-integrated 512x320 tip-tilt micro mirror array and related technology platform

A. Gehner, S. Döring, D. Rudloff, D. Kunze, P. Dürr, S. Francés, L. Hänsel, H. Torlee, A. Elgner, M. Eckert, M. Friedrichs, J. Heber, J. Schmidt, W. Pufe, C. Hohle, M. Schulze, M. Wagner

Proceedings Volume 11293, 1129302 (2020) https://doi.org/10.1117/12.2543052

KEYWORDS: Mirrors, Actuators, Micromirrors, Optical lithography, Calibration, Analog electronics, CMOS technology

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