Mr. Sheng-Yueh Chang Profile

Sheng-Yueh Chang

Principal Engineer at United Microelectronics Corp

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Publications (2)

Proceedings Article | 12 May 2005 Paper

Feasibility study of sub-65nm contact/hole patterning

Yung Cheng, Te Wu, C. Lin, Sheng Chang, Benjamin Lin

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.599571

KEYWORDS: Lithographic illumination, Optical lithography, Lithography, Logic, Optical proximity correction, Photomasks, Resolution enhancement technologies, Printing, Manufacturing, SRAF

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Proceedings Article | 11 June 1999 Paper

ArF photoresist system: using cycloolefin-alt-maleic anhydride pericyclic acrylate terpolymers

Sheng-Yueh Chang, Kung-Lung Cheng, Bang-Chein Ho, Jui-Fa Chang, Jian-Hong Chen, Ting-Chung Liu, Tzu-Yu Lin

Proceedings Volume 3678, (1999) https://doi.org/10.1117/12.350193

KEYWORDS: Photoresist materials, Etching, Semiconducting wafers, Polymers, Lithography, Photoresist developing, Scanning electron microscopy, Resistance, Imaging systems, Deep ultraviolet

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