Mr. Shotaro Noda Profile

Shotaro Noda

at Photo electron Soul Inc

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Author

Publications (2)

Proceedings Article | 27 April 2023 Poster + Paper

Novel electron beam technology using InGaN photocathode for high-throughput scanning electron microscope imaging

Daiki Sato, Atsushi Koizumi, Haruka Shikano, Shotaro Noda, Yohei Otsuka, Daisuke Yasufuku, Kazumasa Mori, Hokuto Iijima, Tomohiro Nishitani, Yoshio Honda, Hiroshi Amano

Proceedings Volume 12496, 1249629 (2023) https://doi.org/10.1117/12.2657032

KEYWORDS: Electron beams, Quantum efficiency, Scanning electron microscopy, Indium gallium nitride, Semiconductors

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Proceedings Article | 27 April 2023 Poster + Paper

Photoelectron beam technology for SEM imaging with pixel-specific control of irradiation beam current

T. Nishitani, Y. Arakawa, S. Noda, A. Koizumi, D. Sato, H. Shikano, H. Iijima, Y. Honda, H. Amano

Proceedings Volume 12496, 124962N (2023) https://doi.org/10.1117/12.2657853

KEYWORDS: Scanning electron microscopy, Electron beams, Semiconductors, Electrodes, Laser irradiation, Imaging systems, Modulation, Control systems, Beam controllers, Semiconductor lasers

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