Dr. Shuai Yuan Profile

Dr. Shuai Yuan

at East China Normal University

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Publications (2)

Proceedings Article | 24 November 2023 Paper

Multilayer defect compensation based on three dimensional absorber correction in EUV lithography

Zheng Hang, Sikun Li, Dongchao Pang, Longqiao Zhang, Shuai Yuan, Xiangzhao Wang

Proceedings Volume 12935, 129354E (2023) https://doi.org/10.1117/12.3007995

KEYWORDS: Printing, 3D mask effects, Multilayers, Extreme ultraviolet lithography, Extreme ultraviolet, Simulations, Diffraction, Deformation, 3D image processing, Reflection, Phase compensation

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Proceedings Article | 24 November 2023 Paper

Analysis of extreme ultraviolet mask defect inspection based on complex amplitudes of the aerial images

Longqaio Zhang, Sikun Li, Hang Zheng, Shuai Yuan, Xiangzhao Wang

Proceedings Volume 12935, 129353D (2023) https://doi.org/10.1117/12.3007756

KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Phase reconstruction, Image analysis

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