Mr. Shuji Matsunaga Profile

Shuji Matsunaga

at Kuraray Co Ltd

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Publications (2)

Proceedings Article | 1 April 2009 Paper

Evaluation of novel resist materials for EUV lithography

Ichihiro Aratani, Shuji Matsunaga, Tsuyoshi Kajiyashiki, Takeo Watanabe, Hiroo Kinoshita

Proceedings Volume 7273, 72731Z (2009) https://doi.org/10.1117/12.813586

KEYWORDS: Polymers, Extreme ultraviolet lithography, Extreme ultraviolet, Chemical species, Absorption, Oxygen, Sulfur, Semiconducting wafers, Carbon, Hydrogen

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Proceedings Article | 22 March 2007 Paper

Observing morphology on surface of poly(methacrylate) in ArF lithography using AFM phase image

Shuji Matsunaga, Ichihiro Aratani, Fumihiko Okabe, Masahiko Kitayama

Proceedings Volume 6519, 65193W (2007) https://doi.org/10.1117/12.711392

KEYWORDS: Polymers, Line edge roughness, Atomic force microscopy, Coating, Polymer thin films, Lithography, Molecules, Atomic force microscope, Chemically amplified resists, Polymerization

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