Mr. Shyam Paudel Profile

Shyam Paudel

at Brewer Science Inc

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Publications (1)

Proceedings Article | 23 March 2020 Paper

Defect mitigation and characterization in silicon hardmask materials

Vineet Alexander, Shyam Paudel, Glenn Dado, Lucia D'Urzo, Virgil Briggs, Mona Bavarian, Rao Varanasi, Tim Limmer, Nick Brakensiek, Levi Gildehaus, Mike Mesawich, Douglas Guerrero

Proceedings Volume 11326, 113261Q (2020) https://doi.org/10.1117/12.2552833

KEYWORDS: Silicon, Particles, Ions, Aluminum, Semiconducting wafers, Scanning electron microscopy, Plasma etching, Lithography

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