We show that metallic wires in CMOS chips can provide dual functionalities as electronic interconnects and as plasmonic/metamaterial devices. We demonstrate plasmonic resonances in a chip fabricated in a bulk Si CMOS foundry (TSMC, 65 nm node). Through minimal post processing, we integrate the designed nanophotonic CMOS chip with liquid crystals and demonstrate a high-speed liquid crystal-based electro-optic modulator.
High-speed SLMs are necessary for various classical and quantum applications, including massively parallel remote sensing, high-repetition-rate pulsed laser shaping, and scalable control of quantum objects at timescales faster than their decoherence time. Here, we demonstrate a high-speed SLM by two-dimensional electric field patterning of a lithium niobate thin film. A high-quality factor guided mode resonance enhances the amplitude and phase modulation from the induced index variation. Our approach offers fast (> GHz), low power, and high diffraction efficiency tuning.
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