Dr. Stephane Durant Profile

Dr. Stephane Durant

Research Scientist at KLA Corp

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Author

Publications (4)

Proceedings Article | 28 March 2014 Paper

Inspection of directed self-assembly defects

Chikashi Ito, Stephane Durant, Steve Lange, Ryota Harukawa, Takemasa Miyagi, Venkat Nagaswami, Paulina Rincon Delgadillo, Roel Gronheid, Paul Nealey

Proceedings Volume 9049, 90492D (2014) https://doi.org/10.1117/12.2046634

KEYWORDS: Inspection, Signal to noise ratio, Etching, Semiconducting wafers, Silicon, Wafer inspection, Defect inspection, Line edge roughness, Wafer-level optics, Directed self assembly

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SPIE Journal Paper | 20 August 2013

Defect source analysis of directed self-assembly process

Paulina Delgadillo, Mayur Suri, Stephane Durant, Andrew Cross, Venkat Nagaswami, Dieter Van den Heuvel, Roel Gronheid, Paul Nealey

JM3, Vol. 12, Issue 03, 031112, (August 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.3.031112

KEYWORDS: Inspection, Etching, Semiconducting wafers, Critical dimension metrology, Particles, Chemical analysis, Scanning electron microscopy, Polymethylmethacrylate, Signal processing, Directed self assembly

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Proceedings Article | 26 March 2013 Paper

Defect source analysis of directed self-assembly process (DSA of DSA)

Paulina Rincon Delgadillo, Ryota Harukawa, Mayur Suri, Stephane Durant, Andrew Cross, Venkat Nagaswami, Dieter Van Den Heuvel, Roel Gronheid, Paul Nealey

Proceedings Volume 8680, 86800L (2013) https://doi.org/10.1117/12.2011674

KEYWORDS: Semiconducting wafers, Etching, Inspection, Critical dimension metrology, Particles, Scanning electron microscopy, Plasma etching, Polymethylmethacrylate, Thin film coatings, Directed self assembly

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Proceedings Article | 30 August 2006 Paper

Theory of optical imaging beyond the diffraction limit with a far-field superlens

Stéphane Durant, Zhaowei Liu, Nicholas Fang, Xiang Zhang

Proceedings Volume 6323, 63231H (2006) https://doi.org/10.1117/12.680804

KEYWORDS: Diffraction, Near field, Wave propagation, Diffraction gratings, Image resolution, Near field optics, Electromagnetism, Radio propagation, Near field scanning optical microscopy, Silver

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