Dr. Stephen A. Coulombe Profile

Dr. Stephen A. Coulombe

Senior Engineer

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Publications (2)

Proceedings Article | 30 October 1998 Paper

Application of optical scatterometry to microelectronics and flat panel display processing

John McNeil, Stephen Coulombe, Petre-Catalin Logofatu, Christopher Raymond, S. Sohail Naqvi, George Collins

Proceedings Volume 3426, (1998) https://doi.org/10.1117/12.328456

KEYWORDS: Scatterometry, Semiconducting wafers, Scanning electron microscopy, Metrology, Microelectronics, Diffraction, Flat panel displays, Scatter measurement, Critical dimension metrology, Diffraction gratings

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Proceedings Article | 8 June 1998 Paper

Ellipsometric scatterometry for sub-0.1-um CD measurements

Stephen Coulombe, Petre-Catalin Logofatu, Babar Minhas, S. Sohail Naqvi, John McNeil

Proceedings Volume 3332, (1998) https://doi.org/10.1117/12.308737

KEYWORDS: Photoresist materials, Phase measurement, Scatterometry, Diffraction gratings, Silicon, Diffraction, Received signal strength, Reflectivity, Metrology, Scatter measurement

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