CONFERENCE PROCEEDINGS
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Dr. Sung Park
at Molecular Vista Inc
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 22 November 2023 Presentation
Nanoscale chemical metrology on latent EUV resist images
Padraic O'Reilly, Luke Long, Warren Holcomb, Thomas Albrecht, Brian Grennon, Patrick Naulleau, Sung Park
Proceedings Volume PC12750, PC127500H (2023) https://doi.org/10.1117/12.2686908
KEYWORDS: Extreme ultraviolet, Metrology, Stochastic processes, Photoresist processing, Line width roughness, Line edge roughness, Infrared spectroscopy, Infrared imaging, Infrared microscopy, Extreme ultraviolet lithography
Proceedings Article | 22 November 2023 Poster
Molecular identification of nanoscale defects and ultrathin residues with IR PiFM
Derek Nowak, Padraic O'Reilly, Brian Grennon, Sung Park
Proceedings Volume PC12751, PC127510Y (2023) https://doi.org/10.1117/12.2687329
KEYWORDS: Infrared spectroscopy, Infrared microscopy, Chemical analysis, Atomic force microscopy, Spatial resolution, Semiconductors, Navigation systems, Infrared radiation, Infrared imaging, Databases
Proceedings Article | 26 May 2022 Presentation + Paper
Identification of sub-20 nm EUV defects with nano-IR PiFM
Proceedings Volume 12053, 120530F (2022) https://doi.org/10.1117/12.2620726
KEYWORDS: FT-IR spectroscopy, Spatial resolution, Infrared spectroscopy, Infrared imaging, Nanospectroscopy, Nanostructured thin films, Nanoimaging, Nanolithography, Molecular nanotechnology
Proceedings Article | 24 March 2020 Presentation
Direct observation of inhibitor and selective deposition on nanoscale patterned structure (Conference Presentation)
Proceedings Volume 11326, 113260T (2020) https://doi.org/10.1117/12.2552154
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