Maskless lithography (ML2) with a scanning high-density spot array has been applied to pattern writing of flat panel displays (FPDs) and printed circuit boards (PCBs). In a ML2 system, spot array diagnostics is necessary to calibrate spot position deviations to achieve exposure pattern uniformity. However, it takes time for the diagnostic including the throughfocus spot profile measurement of a large number of spots (~ 1M spots). Therefore, a high throughput spot diagnostic system is required. We have proposed an alignment-free, high-throughput and cost-effective diagnostic technique with a scanning linear image sensor. Through-focus spot profiles were reconstructed with through-focus scanning signals and response functions of the image sensor pixels. This technique can realize a cost-effective on-machine spot diagnostic system compared to conventional micro-slit scanning systems. We have demonstrated this spot diagnostic with the proofof- concept system. We have confirmed the feasibility in measurements and achieved a lateral position variance of σ < 0.1 μm, (7% of spot size 1.5 μm), an axial position variance of σ < 0.2 μm, (2% of DOF 10 μm) and a telecentricity variance of σ < 1.0 mrad. These variances are then correlating with the level of positioning variances in the stage repeatability. In addition, we also have demonstrated an estimation of low-order wavefront aberrations with a focal spot profile. This onmachine laser spot diagnostic tool could contribute to improve the pattering quality and monitor the optical performance for various focus-spot laser processing systems.
We present a novel optical device which interchanges two orthogonal directions in the cross-section of a beam. The optical prism is composed of six flat faces and has particular edge angles. The beam passing through the component is totally reflected at right angles inside the prism and flipped diagonally at the exit with respect to the entrance. When a line beam is incident to the device, the beam is segmented step by step at the first side face and combined on the other side. The overall shape of the line beam is maintained at the exit, but the segments of the line beam are flipped. The narrow axis of the line beam at the exit has the divergence angle corresponding to the long axis at the entrance. The component is also useful to focus beams from linear laser diode array with asymmetric divergence angles. Compared to the other beam transformation systems, the suggested device has advantages of easy fabrication, coating-free and no energy loss on reflective surfaces.
One of the most popular methods for high precision lens assembly of an optical system is using an autocollimator and a rotation stage. Some companies provide software for calculating the state of the lens along with their lens assembly systems, but the calculation algorithms used by the software are unknown. In this paper, we suggest a calculation method for lens alignment errors using ray transfer matrices. Alignment errors resulting from tilting and decentering of a lens element can be calculated from the tilts of the front and back surfaces of the lens. The tilt of each surface can be obtained from the position of the reticle image on the CCD camera of the autocollimator. Rays from a reticle of the autocollimator are reflected from the target surface of the lens, which rotates with the rotation stage, and are imaged on the CCD camera. To obtain a clear image, the distance between the autocollimator and the first lens surface should be adjusted according to the focusing lens of the autocollimator and the lens surfaces from the first to the target surface. Ray propagations for the autocollimator and the tilted lens surfaces can be expressed effectively by using ray transfer matrices and lens alignment errors can be derived from them. This method was compared with Zemax simulation for various lenses with spherical or flat surfaces and the error was less than a few percent.
In previous works, the possibility of the electrostrictive polymer as the actuator use has been proved. In this paper we address an actual design of an actuator and an inchworm type robotic mechanism using the electrostrictive polymer. The robot will be developed to move horizontally, vertically with steering capability, aiming for navigation in small tubular structures such as flexible pipes but now in this stage a simple bellows type robot capable of accomplishing the linear movement like that of an inchworm is introduced. The issues about the mechanism design of the prototype, which has already been developed and under the consideration of reduction in size, are discussed and preliminary results of experiments are given.
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