Mr. Thomas J. Becker Profile

Thomas J. Becker

at RTX Corp

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 20 January 2003 Paper

MEMS spatial light modulators with integrated electronics

Thomas Becker, Thomas Bifano, Hocheol Lee, Michele Miller, Paul Bierden, Steven Cornelissen

Proceedings Volume 4983, (2003) https://doi.org/10.1117/12.477931

KEYWORDS: Actuators, Mirrors, Metals, Electronics, Microelectromechanical systems, Aluminum, Electrodes, Photoresist materials, Etching, Control systems

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years