Dr. Thomas J. Markley Profile

Dr. Thomas J. Markley

Sr. Research Chemist at Air Products and Chemicals Inc

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Author

Publications (4)

Proceedings Article | 4 May 2005 Paper

Novel negative tone photodefinable low dielectric constant hybrid films

Thomas Markley, Scott Weigel, Chris Kretz

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.599989

KEYWORDS: Dielectrics, Lithography, Scanning electron microscopy, Ultraviolet radiation, Polymers, Polymer thin films, Mercury, Silicon, Photomasks, Deep ultraviolet

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Proceedings Article | 14 May 2004 Paper

Novel reactions of quadricyclane: a new route to monomers for low-absorbing polymers in 157-nm photoresists

John Marsella, Atteye Abdourazak, Richard Carr, Thomas Markley, Eric Robertson

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.535613

KEYWORDS: Photoresist materials, Polymers, Absorption, Transparency, Lithography, Absorbance, Industrial chemicals, Chemistry, Etching, Resistance

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Proceedings Article | 14 May 2004 Paper

Hexafluoroisopropyl and trifluoromethyl carbinols in an acrylate platform for 157-nm chemically amplified resists

Vladimir Jakubek, Eric Robertson, Atteye Abdourazak, Thomas Markley, John Marsella, Christopher Ober

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.536586

KEYWORDS: Fluorine, Polymers, Transparency, Etching, Resistance, Lithography, Absorption, Chemical species, Chemically amplified resists, Silicon

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Proceedings Article | 12 June 2003 Paper

Impact of surfactant in developer on CD performance

Peng Zhang, Manuel Jaramillo, Danielle King, Thomas Markley, Zarka Zarkov, David Witko, Ted Paxton, Todd Davis

Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485125

KEYWORDS: Critical dimension metrology, Polymers, Semiconducting wafers, Photoresist developing, Foam, Crystals, Deep ultraviolet, Photoresist materials, Polymer thin films, Scanners

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