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Toshiaki Tanaka
at Osaka Metropolitan Univ
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Publications (1)
Proceedings Article | 1 May 2023 Poster + Paper
Computational study of 3-dimensional photo lithography on limitations and possibility for novel structures
Yoshihiko Hirai, Tomoaki Osumi, Toshiaki Tanaka, Masaaki Yasuda, Masaru Sasago
Proceedings Volume 12497, 124970T (2023) https://doi.org/10.1117/12.2658128
KEYWORDS: 3D image processing, Optical lithography, Design and modelling, Transmittance, Lithography, Wavefronts, Image acquisition
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