Mr. Tung-Ying Lee Profile

Tung-Ying Lee

at KLA Taiwan

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Publications (1)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Investigation and optimization of STI dry-etch induced overlay through patterned wafer geometry tool

Tsu-Wen Huang, Ying-Cheng Chuang, Hsuan-Jui Huang, Chung-Chang Liu, Hsiao-Lun Chu, Sheng-Yu Chen, Ming-Ju Li, Jun-Eu Tang, Chiou-Shoei Chee, Choon-Wai Chang, Tung-Ying Lee

Proceedings Volume 11611, 1161139 (2021) https://doi.org/10.1117/12.2584589

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