Mr. Ulrich Klug Profile

Ulrich Klug

at Laser Zentrum Hannover eV

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Author

Publications (7)

Proceedings Article | 11 February 2011 Paper

On the damage behaviour of Al2O3 insulating layers in thin film systems for the fabrication of sputtered strain gauges

Oliver Suttmann, Ulrich Klug, Rainer Kling

Proceedings Volume 7925, 792515 (2011) https://doi.org/10.1117/12.876134

KEYWORDS: Laser damage threshold, Optical lithography, Laser ablation, Thin films, Sensors, Laser processing, Metals, Pulsed laser operation, Dielectrics, Adhesives

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Proceedings Article | 25 February 2010 Paper

Picosecond laser patterning of NiCr thin film strain gages

Oliver Suttmann, Michael Gosselin, Ulrich Klug, Rainer Kling

Proceedings Volume 7589, 758914 (2010) https://doi.org/10.1117/12.840842

KEYWORDS: Thin films, Laser ablation, Optical lithography, Sensors, Polishing, Aluminum, Picosecond phenomena, Nickel, Metals, Diffusion

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Proceedings Article | 17 February 2010 Paper

Polarization converted laser beams for micromachining applications

Ulrich Klug, Jan Düsing, Takashi Sato, Kunihiko Washio, Rainer Kling

Proceedings Volume 7590, 759006 (2010) https://doi.org/10.1117/12.842141

KEYWORDS: Polarization, Silicon, Scanning electron microscopy, Micromachining, Laser ablation, Image segmentation, Pulsed laser operation, Absorption, Laser processing, Picosecond phenomena

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Proceedings Article | 25 February 2009 Paper

Micromachining with picosecond double pulses on silicon and aluminium

B. Wojakowski, O. Suttmann, U. Klug, R. Kling

Proceedings Volume 7202, 72020O (2009) https://doi.org/10.1117/12.810152

KEYWORDS: Picosecond phenomena, Silicon, Aluminum, Laser ablation, Plasma, Micromachining, Pulsed laser operation, Scanning electron microscopy, Semiconductor lasers, Oscillators

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Proceedings Article | 26 February 2008 Paper

Laser beam shaping for micromaterial processing using a liquid crystal display

U. Klug, M. Boyle, F. Friederich, R. Kling, A. Ostendorf

Proceedings Volume 6882, 688207 (2008) https://doi.org/10.1117/12.763542

KEYWORDS: Diffraction, Beam shaping, Spatial light modulators, Micromachining, Quantization, Signal to noise ratio, Stars, Liquid crystal on silicon, Diodes, LCDs

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Proceedings Article | 1 July 2005 Paper

Mass balancing and spring element manipulation of micromechanical silicon-gyrometers with ultrashort laser pulses

U. Klug, B. Rahn, U. Stute, A. Ostendorf

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608659

KEYWORDS: Laser ablation, Sensors, Silicon, Laser processing, Ultrafast phenomena, Semiconductor lasers, Video, Calibration, Scanners, Electronic circuits

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Proceedings Article | 12 April 2005 Open Access

Femtosecond versus picosecond laser ablation

Andreas Ostendorf, Guenter Kamlage, Ulrich Klug, Frank Korte, Boris Chichkov

Proceedings Volume 5713, (2005) https://doi.org/10.1117/12.597975

KEYWORDS: Picosecond phenomena, Femtosecond phenomena, Laser systems engineering, Laser drilling, Laser cutting, Silicon, Semiconductor lasers, Semiconducting wafers, Pulsed laser operation, Scanning electron microscopy

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