Dr. Wen-Li Cheng Profile

Dr. Wen-Li Cheng

at Synopsys Taiwan Co Ltd

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Publications (3)

Proceedings Article | 12 November 2024 Presentation + Paper

Manhattan and curvilinear mask error correction

Yung-Yu Chen, Chien-Yun Yang, Wen-Li Cheng, Jing-Wei Shih, Yu-Po Tang, John Valadez, Linghui Wu, Guangming Xiao

Proceedings Volume 13216, 132161M (2024) https://doi.org/10.1117/12.3034652

KEYWORDS: Contour modeling, Optical proximity correction, Distance measurement, Shape analysis, Error analysis, Target recognition, Mask making, Smoothing

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SPIE Journal Paper | 24 November 2023

Curvilinear mask handling in OPC flow

Yung-Yu Chen, Kai-Hsiang Chang, Wen-Li Cheng, Yu-Po Tang

JM3, Vol. 23, Issue 01, 011203, (November 2023) https://doi.org/10.1117/12.10.1117/1.JMM.23.1.011203

KEYWORDS: Optical proximity correction, Shrinkage, Shape analysis, Visualization, Optical lithography, Nonlinear control, Manufacturing, Lithography, Industry, Histograms

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Proceedings Article | 28 April 2023 Presentation + Paper

Curvilinear mask handling in OPC flow

Yung-Yu Chen, Kai-Hsiang Chang, Wen-Li Cheng, Yu-Po Tang

Proceedings Volume 12495, 1249505 (2023) https://doi.org/10.1117/12.2663274

KEYWORDS: Optical proximity correction, Shrinkage, Nonlinear control, Histograms, Shape analysis, Model-based design, Lithography, Industry

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