Dr. Wilfried Clauss Profile

Dr. Wilfried Clauss

at Carl Zeiss SMT GmbH

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 15 March 2006 Paper

John Burnett, Simon Kaplan, Eric Shirley, Deane Horowitz, Wilfried Clauss, Andrew Grenville, Chris Van Peski

Proceedings Volume 6154, 615418 (2006) https://doi.org/10.1117/12.656901

KEYWORDS: Garnet, Spinel, Crystals, Ceramics, Aluminum, Germanium, Oxides, Lutetium, Magnesium, Optical properties

Proceedings Article | 1 July 2002 Paper

Oliver Kienzle, Rainer Knippelmeyer, Wilfried Claus, Marko Matijevic, Lars Ehrhardt, Wolf Rau, Alexander Orchowski

Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472332

KEYWORDS: Optical components, Tolerancing, Lithography, Aberration correction

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Keywords/Phrases