An ultra-compact optical true time delay device is demonstrated that can support 112 antenna elements with better than
six bits of delay in a volume 16"×5"×4" including the box and electronics. Free-space beams circulate in a White cell,
overlapping in space to minimize volume. The 18 mirrors are slow-tool diamond turned on two substrates, one at each
end, to streamline alignment. Pointing accuracy of better than 10μrad is achieved, with surface roughness ~45 nm rms. A
MEMS tip-style mirror array selects among the paths for each beam independently, requiring ~100 μs to switch the
whole array. The micromirrors have 1.4° tip angle and three stable states (east, west, and flat). The input is a fiber-and-microlens
array, whose output spots are re-imaged multiple times in the White cell, striking a different area of the single
MEMS chip in each of 10 bounces. The output is converted to RF by an integrated InP wideband optical combiner
detector array. Delays were accurate to within 4% (shortest delay) to 0.03% (longest mirror train). The fiber-to-detector
insertion loss is 7.82 dB for the shortest delay path.
An all reflective Shack Hartmann style wavefront sensor has been developed using a Sandia National
Laboratory segmented Micro-Electro-Mechanical (MEM) deformable mirror. This wavefront sensor is
presently being explored for use with adaptive optics systems at the Naval Prototype Optical Interferometer
and other experimental adaptive systems within the Naval Research Laboratory. The 61 MEM mirror
segments are constructed in a hexagonal array and each segment can be constructed with either flat or
optically powered surfaces. The later allows each mirror segment to bring its subaperture of light to a focus
on an imaging array, creating an array of spots similar to a Shack Hartmann. Each mirror segment has tip,
tilt and piston functionality to control the position of the focused spot such that measurement of the applied
voltage can be used to drive a deformable mirror. As the system is reflective and each segment is
controllable, this wavefront sensor avoids the light loss associated with refractive optics and has larger
dynamic range than traditional Shack Hartmann wavefront sensors. This wavefront sensor can detect large
magnitude aberrations up to and beyond where the focused spots overlap, due to the ability to dither each
focused spot. Previous publications reported on this novel new technique and the electrical specifications,
while this paper reports on experiments and analysis of the open-loop performance, including repeatability
and linearity measurements. The suitability of using the MEM deformable mirror as a high dynamic range
reflective wavefront sensor will be discussed and compared to current wavefront sensors and future work
will be discussed.
Deployment costs of large aperture systems in space or near-space are directly related to the weight of the system. In
order to minimize the weight of conventional primary mirrors and simultaneously achieve an agile system that is capable
of a wider field-of-view (FOV) and true optical zoom without macroscopic moving parts, we are proposing a
revolutionary alternative to conventional zoom systems where moving lenses/mirrors and gimbals are replaced with
lightweight carbon fiber reinforced polymer (CFRP) variable radius-of-curvature mirrors (VRMs) and MEMS
deformable mirrors (DMs). CFRP and MEMS DMs can provide a variable effective focal length, generating the
flexibility in system magnification that is normally accomplished with mechanical motion. By adjusting the actuation of
the CFRP VRM and MEMS DM in concert, the focal lengths of these adjustable elements, and thus the magnification of
the whole system, can be changed without macroscopic moving parts on a millisecond time scale. In addition, adding
optical tilt and higher order aberration correction will allow us to image off-axis, providing additional flexibility.
Sandia National Laboratories, the Naval Research Laboratory, Narrascape, Inc., and Composite Mirror Applications,
Inc. are at the forefront of active optics research, leading the development of active systems for foveated imaging, active
optical zoom, phase diversity, and actively enhanced multi-spectral imaging. Integrating active elements into an
imaging system can simultaneously reduce the size and weight of the system, while increasing capability and flexibility.
In this paper, we present recent progress in developing active optical (aka nonmechanical) zoom and MEMS based
foveated imaging for active imaging with a focus on the operationally responsive space application.
Micromirrors arrays can be used to correct residual wavefront aberrations in certain
optical systems. The aberration correction capability of arrays of piston-only and piston-tip-tilt
micromirrors are compared. Sandia's micromirror fabrication program is discussed and two example
systems are presented.
KEYWORDS: Control systems, Chemical elements, Micromirrors, Bistability, Mirrors, Control systems design, Modulation, Microelectromechanical systems, Digital micromirror devices, Electromechanical design
This research involves the design and implementation of a complete line-addressable control system for a 32 X 32 electrostatic piston-actuated micromirror array device. Line addressing reduces the number of control lines from N2 to 2N making it possible to design larger arrays and arrays with smaller element sizes. The system utilizes the electromechanical bistability of individual elements to hold arbitrary bistable phase patterns, a technique previously used on tilt arrays. The control system applies pulse width modulated (PWM) signals to the rows and columns of the device to generate a static phase pattern across the array. Three modes of operation are considered and built into the system. The first is the traditional signal scheme which requires the array to be reset before a new pattern can be applied. The second is an original scheme that allows dynamic switching between bistable patterns. The third and final mode considered is an effective voltage ramp across the device by operating above mechanical cutoff. Device characterization and control system testing are conducted on samples from two different foundry processes. The test results showed that the control system was successfully integrated, however individual bistable control was not successfully demonstrated on the micromirror arrays tested. The inability to demonstrate bistable control is attributed to flaws in the device and variations in snap-down voltage with the application of PWM signals below mechanical cutoff. Methods to correct these flaws for a future redesigned line- addressable device are proposed.
The NSF Center for Adaptive Optics (CfAO) is coordinating a five to ten year program for the development of MEMS-based spatial light modulators suitable for adaptive optics applications. Participants in this multi-disciplinary program include several partner institutions and research collaborators. The goal of this program is to produce MEMS spatial light modulators with several thousand actuators that can be used for high-resolution wavefront control applications and would benefit from low device cost, small system size, and low power requirements. We present an overview of the CfAO MEMS development plan along with details of the current program status. Piston mirror array devices that satisfy minimum application requirements have been developed, and work is continuing to enhance the piston devices, add tip-tilt functionality, extend actuator stroke, create a large array addressing platform, and develop new coating processes.
Micro-Optical-Electro-Mechanical Systems (MOEMS) employ batch fabrication processes to construct miniature devices with macroscopic functionality. Surface micromachiend MOEMS structures are manufactured by the deposition and patterning of thin films. In marked contrast with conventional fabrication processes, the thin film materials used in surface micromachiend structures are formed as the device is processed. In general, the material properties of thin films are not controlled during deposition, and are only measured after processing is completed. Characterization techniques currently wafer curvature measurements and a variety of test structures. None of the thin film characterization techniques currently employed is entirely satisfactory and all methods rely on process repeatability to be useful. The ultimate optical performance of MOEMS depends directly on the materials properties of the thin films employed. Differing residual material stresses and residual stress gradients cause curvature which degrades the optical performance of nominally flat reflecting surfaces. For multilayer structures like most micromirrors curvature due to the bimetallic effect can not be ignored. Recent work in which foundry processes were used to fabricate low-0cost deformable mirrors for adaptive optics illustrates the impact of residual material stress on system level optical performance. In other MOEMS devices residual material stress can be exploited to produce unique structures. More precise monitoring and control of film stress during deposition remains as a challenge for MEMS and MOEMS. This paper will address the principal materials issues for MOEMS and suggest both design and process control solutions.
This paper presents a fast 2D phase retrieval approach used to perform optical phase modulation of a Microelectromechanical Deformable-Mirror (MEM-DM). Traditional solutions to beam splitting, beam steering, and beam shaping (BS3) involve multiple and sometimes costly optical components. For example, beam splitting is normally accomplished with beam splitters, beam steering is normally achieved with gimbaled mechanical devices, and beam shaping is normally done with addressable absorptive devices such as LCDs. Using the phase retrieval algorithm with a desired far-field amplitude pattern as a constraint, a segmented wavefront control device is shown to simultaneously perform the functions of BS3. The MEM-DM used is a foundry micro-fabricated device that is attractive for optical phase modulation applications primarily because of its inherent low cost and low drive voltages. The MEM-DM shapes the beam based on the results of a modified Fienup and Roggemann/Lee phase retrieval algorithm implemented within the system. The optical bench setup and the experimental results for BS3 are presented. Measured experimental data shows good agreement with model simulations. A comparison between analog MEM-DMs and a digitally controlled MEM-DMs will be addressed in this presentation. Overall, experimental results demonstrate the efficacy of the phase retrieval algorithm and one phase control device in solving optics problems normally solved through traditional techniques and multiple devices.
Adaptive optics technology is critical for many current and developing applications at Lawrence Livermore National Laboratory. In particular, most large laser systems, including those being developed for Inertial Confinement Fusion and Laser Isotope Separation, require adaptive optics to correct for internal aberrations in these high-power systems. In addition, adaptive optics can provide capability for both high-resolution imaging and beam propagation through the atmosphere. Requirements for laser systems, imaging and propagation applications are currently driving wavefront control technology toward increased spatial and temporal frequency capability, as well as reduced system costs. We will present recent progress in the development of micro-electro-mechanical deformable mirrors for adaptive optics applications.
This paper presents recent result for aberration correction and beam steering experiments using polysilicon surface micromachined piston micromirror arrays. Microfabricated deformable mirrors offer a substantial cost reduction for adaptive optic systems. In addition to the reduced mirror cost, microfabricated mirrors typically require low control voltages, thus eliminating high voltage amplifiers. The greatly reduced cost per channel of adaptive optic systems employing microfabricated deformable mirrors promise high order aberration correction at low cost. Arrays of piston micromirrors with 128 active elements were tested. Mirror elements are on a 203 micrometers 12 by 12 square grid. The overall array size is 2.4 mm square. The arrays were fabricated in the commercially available DARPA supported MUMPs surface micromachining foundry process. The cost per mirror array in this prototyping process is less than 200 dollars. Experimental results are presented for a hybrid correcting element comprised of a lenslet array and piston micromirror array, and for a piston micromirror array only. Also presented is a novel digital deflection micromirror which requires no digital to analog converters, further reducing the cost of adaptive optics system.
THis paper presents optical testing of polysilicon surface micromachined piston micromirror arrays. Similar piston micromirror arrays were fabricated using two different commercially available surface micromachining foundry processes: the DARPA supported multi-user MEMS processes (MUMPs), and Sandia Ultra-planar Multi-level MEMS Technology (SUMMiT). All test arrays employ square reflecting elements in an 8 X 8 element 203 micrometers square grid. Fabrication constraints limit the MUMPs designs to fill-factors of less than 80 percent. The chemical mechanical polishing planarization step integral to the SUMMiT process allows an as-drawn fill-factor of 95 percent to be easily achieved. MUMPs designs employ both the standard gold metallization and maskless sputtered chromium/gold post-process metallization, while post process metallization is the only option for the SUMMiT design. Testing of the micromirror arrays focuses on microscope interferometer characterization of mirror topography, and measurement of the far field diffraction pattern for each. The measured results show that control of the individual micromirror element surface topography is more important for imaging applications than maximizing the as-drawn fill-factor.
Micro-electro-mechanical deformable mirrors (MEM-DM) are solid state electronic devices with small, movable reflective surface elements which can be used to manipulate the phase of optical wave fronts. MEM-DMs differ from conventional continuous facesheet deformable mirrors in that the movable surface of a MEM-DM consists of a set of segmented moving surfaces. The segmented, reflective surfaces of a MEM-DM give rise to larger diffraction effects than those provided by continous facesheet deformable mirrors. However, MEM-DMs are still attractive due to their low cost and the low drive voltages. In this paper we present laboratory results demonstrating reduction of a fixed aberration using a MEM-DM device.
This paper reports on modeling the behavior of micromachined polysilicon thermal actuators. The thermal actuators used in this research were fabricated using the DARPA-sponsored multi-user MEMS processes. Data collected in both air and vacuum demonstrates that thermal actuators can be controlled and positioned using a pulsed input with a period much less than the thermal time constant of the device. Both pulse width and pulse amplitude modulation have been successfully employed to position lateral actuators, lateral actuator arrays, and piston micro-mirrors. In order to better exploit the power averaging characteristics of thermal actuators, SPICE models for polysilicon thermal actuators were developed using relationships between resistance, deflection, and average power. These models incorporate the polysilicon thermal actuators electrical load and transient characteristics necessary for predicting actuator performance and developing CMOS drive circuits. The SPICE models exhibit good agreement with theory and measured performance of the polysilicon thermal actuators.
This paper presents novel micro-opto-electro-mechanical (MOEM) applications employing vertical thermal actuators. The high force and large deflection of backbent vertical thermal actuators are useful in many applications, particularly when a single large deflection is required for device setup. For example, backbending two actuators driven in parallel flips a 250 micrometer square mirror to 45 degrees off the substrate. The actuators can then be driven to permit scanning over 45 degrees. In another example, 3 backbent actuators are used to position an electrostatically actuated optical beam steering mirror 10 micrometer off the substrate thereby increasing the maximum steering angle by a factor of 5. Critical to applications like these is predictable and repeatable operation of the actuators. The actuators are comprised of a polysilicon cantilever bar mechanically coupled to two expansion arms. If sufficient current is driven through the expansion arms they deform, bowing upward. Upon removal of the drive current the expansion arms shrink, backbending the actuator by pulling the tip of the actuator upward. Test actuators of three different sizes were carefully backbent. After backbending, the deflection of each actuator was measured on an interferometric microscope with plus or minus 5 nm precision. Although nonlinear, the relationship of backbending deflection to drive power is well behaved, and repeatable.
Resonator structures offer a unique mechanism for characterizing MEMS materials, but measuring the resonant frequency of microstructures is challenging. In this effort a network analyzer system was used to electrically characterize surface-micromachined resonator structures in a carefully controlled pressure and temperature environment.A microscope laser interferometer was used to confirm actual device deflections.Cantilever, comb, and piston resonators fabricated in the DARPA-sponsored MUMPs process were extensively tested. Measured resonator frequency results show reasonable agreement with analytic predictions computed using manufacturer measured film thickness and residual material stress. Alternatively the measured resonant frequency data can be used to extract materials data. Tuning of resonant frequency with DC bias was also investigated. Because the tested devices vary widely in complexity, form a simple cantilever beam to a comb resonator, the data collected is especially well suited for validation testing of MEMS modeling codes.
This paper compares measured to modeled stress-induced curvature of simple piston micromirrors. Two similar flexure-beam micromirror designs were fabricate using the 11th DARPA-supported multi-user MEMS processes (MUMPs) run. The test devices vary only in the MUMPs layers used for fabrication. In one case the mirror plate is the 1.5 micrometers thick Poly2 layer. The other mirror design employs stacked Poly1 and Poly2 layers for a total thickness of 3.5 micrometers . Both mirror structures are covered with the standard MUMPs metallization of approximately 200 angstrom of chromium and 0.5 micrometers of gold. Curvature of these devices was measured to within +/- 5 nm with a computer controlled microscope laser interferometer system. As intended, the increased thickness of the stacked polysilicon layers reduces the mirror curvature by a factor of 4. The two micromirror designs were modeled using IntelliCAD, a commercial CAD system for MEMS. The basis of analysis was the finite element method. Simulated results using MUMPs 11 film parameters showed qualitative agreement with measured data, but obvious quantitative differences. Subsequent remeasurement of the metal stress and use of the new value significantly improved model agreement with the measured data. The paper explores the effect of several film parameters on the modeled structures. Implications for MEMS film metrology, and test structures are considered.
This paper reports design and characterization testing of thermally actuated piston micromirror arrays. The micromirrors were fabricated in the DARPA-sponsored MUMPs polysilicon surface micromachining process. The power averaging characteristic of thermal actuation is exploited in a novel line addressing scheme which reduces wiring for an n2 array to 2n wires. Mirror deflections were measured with a microscope laser interferometer system equipped with a vacuum chamber. Data presented includes device uniformity, frequency response, and deflection versus drive power for varied ambient pressure. Initial test results confirm that thermally actuated piston micromirrors offer several advantages over more common electrostatic designs. Thermally actuated micromirrors offer greater deflections at drive voltages compatible with CMOS circuitry. Measured thermal piston micromirror deflection versus drive voltage is nonlinear, but does not exhibit the 'snap through instability' characteristic of electrostatic devices. Operation of thermally actuated devices in rarefied ambient significantly decreases power dissipation. For a given deflection range, the power reduction facilitated by vacuum operation makes large arrays feasible. Frequency response of thermally actuated devices is limited by the ability of the device to dissipate heat, but operation at 1 kHz rates is feasible.
This paper describes installation of a long wavelength infrared (LWIR) acquisition camera on the Starfire Optical Range (SOR) 1.5 meter telescope, and reports initial performance results. This camera was designed for acquisition of satellites night or day, irrespective of target illumination. The camera may also have wide field-of-view astronomy applications. The optical design for this LWIR acquisition camera maps a 128 X 128 pixel Si:As impurity band conduction detector array onto the two milliradian telescope scene. A warm, aspheric germanium lens images the f/217 telescope beam onto a cold field stop, and the telescope pupil onto a cryogenic chopping mirror. The cryogenic chopping mirror has an opaque mask which serves as a radiation stop. A second, cooled, aspheric germanium lens reimages the field stop onto the detector array. Operation of the camera over the 7 - 24 micrometers detection band of the array is possible by replacing the interference filter and zinc selenide vacuum window. Problems and solutions pertaining to integration of the camera and cryocooler system on the telescope are described. Initial performance data reported include: optics/array radiometry, telescope background measurements, cryocooler induced telescope jitter measurements, and cryogenic chopping mirror characteristics.
Ronald Lipinski, Dorothy Meister, Steve Tucker, Phillip Leatherman, Robert Fugate, Carl Maes, W. Joseph Lange, William Cowan, Richard Cleis, James Spinhirne, Raymond Ruane, Janice Glover, Robert Michie, Andrew Meulenberg
The ability to acquire, track, and accurately direct a laser beam to a satellite is crucial for power-beaming and laser-communications. To assess the state of the art in this area, a team consisting of Air Force Phillips Laboratory, Sandia National Laboratories, and COMSAT Corporation personnel performed some laser beaming demonstrations to various satellites. A ruby laser and a frequency-doubled YAG laser were used with the Phillips Lab Starfire Optical Range (SOR) beam director for this activity. The ruby laser projected 20 J in 6 ms out the telescope with a beam divergence that increased from 1.4 to 4 times the diffraction limit during that time. The doubled YAG projected 0.09 J in 10 ns at 20 Hz. The SOR team demonstrated the ability to move rapidly to a satellite, center it in the telescope, then lock onto it with the tracker, and establish illumination. Several low-earth-orbit satellites with corner- cube retro-reflectors were illuminated at ranges from 1000 to 6000 km with a beam divergence estimated to be about 20 (mu) radians. The return signal from the ruby laser was collected in a 15-cm telescope, detected by a photomultiplier tube, and recorded at 400 kHz. Rapid variations in intensity (as short as 15 microsecond(s) ) were noted, which may be due to speckles caused by phase interference from light reflected from different retro-reflectors on the satellite. The return light from the YAG was collected by a 35-cm telescope and detected by an intensified CCD camera. The satellite brightened by about a factor of 30 in the sunlight when the laser was turned on, and dimmed back to normal when the 50-(mu) radian point- ahead was turned off. The satellite was illuminated at 1 Hz as it entered the earth's shadow and followed for about 10 seconds in the shadow. In another demonstration, four neighboring GEO satellites were located and centered in succession with a 3.5-m telescope at a rate of about 16 seconds per satellite.
This paper describes a Phillips Laboratory internal design for a high sensitivity, large field of view IR acquisition camera. Currently, the acquisition of a satellite with the 1.5 meter telescope of the Starfire Optical Range typically requires a sunlit target and dark sky. However, the level of thermal radiation from such a satellite is often sufficiently high in the long wavelength IR (LWIR) to permit detection with ground based telescopes irrespective of target illumination. The drawbacks of LWIR acquisition include the high levels of thermal radiation from both the telescope and the atmosphere which pose two constraints: (1), the 'background signal' usually exceeds the target signal and must be removed on time scales over which it is relatively constant, and (2), associated with the background signal is a noise level that dominates all system noise sources. The background signal level at the detector array for our application varies between 1015 to 1016 photons sec-1 cm-2, depending on the IR bandpass used. Our optical design for the LWIR acquisition camera maps a 128x128 pixel detector array onto a two milliradian (mrad) scene. The optical design uses two aspheric lenses, one to re-image the field onto a cold field stop, and the telescope pupil onto a cryogenic chopping mirror and collocated radiation stop. The second lens re-images the field stop onto the detector array. Aberrations are designed to be better than diffraction limited over the entire two mrad field of view. The end product of the acquisition system is a video display of the IR scene, with the background signal removed. A user then positions mouse-driven cross hairs over a target in the scene. The resulting position and time update is used to revise the target ephemeris, and to provide pointing information for target acquisition by other SOR tracking platforms.
Ronald Lipinski, Dorothy Meister, Steve Tucker, Robert Fugate, Phillip Leatherman, Carl Maes, W. Joseph Lange, William Cowan, Andrew Meulenberg, Richard Cleis, James Spinhirne, Raymond Ruane, Robert Michie, Donald Vonderhaar
A team of Phillips Laboratory, COMSAT Laboratories, and Sandia National Laboratories plans to demonstrate state-of-the-art laser-beaming demonstrations to high-orbit satellites. The demonstrations will utilize the 1.5-m diameter telescope with adaptive optics at the AFPL Starfire Optical Range (SOR) and a ruby laser provided by the Air Force and Sandia (1 - 50 kW and 6 ms at 694.3 nm). The first targets will be corner-cube retro-reflectors left on the moon by the Apollo 11, 14, and 15 landings. We attempt to use adaptive optics for atmospheric compensation to demonstrate accurate and reliable beam projection with a series of shots over a span of time and shot angle. We utilize the return signal from the retro- reflectors to help determine the beam diameter on the moon and the variations in pointing accuracy caused by atmospheric tilt. This is especially challenging because the retro-reflectors need to be in the lunar shadow to allow detection over background light. If the results from this experiment are encouraging, we will at a later date direct the beam at a COMSAT satellite in geosynchronous orbit as it goes into the shadow of the earth. We utilize an onboard monitor to measure the current generated in the solar panels on the satellite while the beam is present. A threshold irradiance of about 4 W/m2 on orbit is needed for this demonstration.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.