Currently, MEMS tunable grating draws a lot of attentions due to its promising applications in display, spectrometer,
external cavity laser, programmable mask, optical telecommunication, etc. Among phase-tunable and incident-angletunable
grating, period-tunable grating distinguishes itself by relative simple structure, ease-to-fabrication, good
performance, and ability to be integrated with IC. In this paper, a novel approach based on compressed period grating is
demonstrated. Based on a developed comb-drive actuator working in a low voltage of 37V, our grating period was
compressed for 12.5%. The first resonant mode of the comb-drive actuator was simulated to be 3.8 kHz by finite element
modeling.
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