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Xiangyang Liu
at Shanghai Institute of Technical Physics
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Publications (1)
Proceedings Article | 13 April 2015 Paper
Fabrication and surface profile simulation of sapphire microlens array
Xiangyang Liu, Shijia Liu, Hui Qiao, Longyuan Zhu, Xiangyang Li
Proceedings Volume 9522, 95221Q (2015) https://doi.org/10.1117/12.2180221
KEYWORDS: Photoresist materials, Sapphire, Microlens, Microlens array, Etching, Statistical modeling, Sensors, Process modeling, Device simulation, Finite element methods
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