Xingang Yu
at KTH Royal Institute of Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 13 May 2010 Paper
Qin Wang, Andy Zhang, Andreas Bergström, Vicky Huo, Susanne Almqvist, Wlodek Kaplan, Jan Andersson
Proceedings Volume 7716, 771609 (2010) https://doi.org/10.1117/12.853959
KEYWORDS: Molybdenum, Photoresist materials, Microlens, Ultraviolet radiation, Transmittance, Silicon, Microlens array, Etching, Optical properties, Reactive ion etching

Proceedings Article | 28 April 2010 Paper
Proceedings Volume 7720, 772021 (2010) https://doi.org/10.1117/12.854443
KEYWORDS: Vertical cavity surface emitting lasers, Etching, Mirrors, Modulation, Quantum wells, Optical lithography, Silica, Gallium arsenide, Dielectrics, Absorption

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