Prof. Xue Li Profile

Prof. Xue Li

at Shanghai Institute of Technical Physics CAS

SPIE Involvement:

Author

Publications (51)

Proceedings Article | 13 December 2024 Paper

Zn diffusion mechanism in InGaAs infrared detector

Honghai Deng, Zhiliang Wang, Xinglong Guo, Yi Li, Youhua Zhu, Xue Li, Haimei Gong

Proceedings Volume 13493, 134930D (2024) https://doi.org/10.1117/12.3047989

KEYWORDS: Diffusion, Sensors, Doping, Zinc, Particle filters, Indium gallium arsenide, Indium arsenide, Dark current, Photomicroscopy, Interfaces

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Proceedings Article | 31 January 2023 Paper

Research on 640x512-5μm InGaAs short-wave infrared focal plane readout circuit

Yifan Lu, Hongyi Wang, Wengang Tao, Songlei Huang, Xue Li

Proceedings Volume 12505, 125050T (2023) https://doi.org/10.1117/12.2665816

KEYWORDS: Amplifiers, Signal processing, Sensors, Signal detection, Indium gallium arsenide, Short wave infrared radiation, Infrared imaging, Infrared detectors

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Proceedings Article | 31 January 2023 Paper

The magic of III-Vs

Yong-gang Zhang, Yi Gu, Ying-Jie Ma, Xiu-Mei Shao, Xue Li, Hai-Mei Gong, Jia-Xiong Fang

Proceedings Volume 12505, 125050K (2023) https://doi.org/10.1117/12.2664543

KEYWORDS: Binary data, Chemical elements, Gallium arsenide, Indium arsenide, Gallium antimonide, Bismuth, Alloys, Aluminum, Arsenic, Antimony

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Proceedings Article | 24 November 2021 Paper

InGaAs short wavelength infrared detector based on carrier collection effect

Honghai Deng, Qinghua Yang, Zhiliang Wang, Xinglong Guo, Haibao Shao, Xue Li, Haimei Gong

Proceedings Volume 12061, 120611R (2021) https://doi.org/10.1117/12.2607037

KEYWORDS: Sensors, Indium gallium arsenide, Diffusion, Infrared detectors, Signal detection, Infrared sensors, Doping, Short wave infrared radiation

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Proceedings Article | 24 November 2021 Paper

Focused micro-lens array design and performance testing

Hongyan Xu, Defeng Mo, Yingjie Ma, Zhenli Zhao, Xiangyang Liu, Tong Zhao, Xue Li

Proceedings Volume 12061, 1206111 (2021) https://doi.org/10.1117/12.2605952

KEYWORDS: Staring arrays, Microlens array, Light sources, CCD cameras, Microscopes, Zemax, Spherical lenses, Sensors, Optical fibers, Optical alignment

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Proceedings Article | 13 December 2020 Poster + Paper

Design of a test platform with a cyrocooler for InGaAs FPA

Wen-qing Qu, Jie Chen, Qi-Jie Tang, Jin-ting Chen, Zhi-yue Wang, Cheng Chen, Hui Wang, Hong-fei Zhang, Tao Li, Xue Li, Jian Wang

Proceedings Volume 11454, 114543L (2020) https://doi.org/10.1117/12.2559846

KEYWORDS: Sensors, Indium gallium arsenide, Staring arrays, Infrared sensors, Cryocoolers, Infrared radiation, Temperature metrology, Infrared astronomy, Infrared detectors, Infrared imaging

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Proceedings Article | 5 November 2020 Paper

Fabrication of highly-uniform indium ball bumps for small unit-cell infrared focal plane arrays

Yingjie Ma, Xianliang Zhu, Bo Yang, Jifeng Cheng, Yi Gu, Tao Li, Xiumei Shao, Xue Li, Haimei Gong

Proceedings Volume 11563, 1156302 (2020) https://doi.org/10.1117/12.2574333

KEYWORDS: Indium, Photoresist materials, Staring arrays, Electrodes, Scanning electron microscopy, Lithography, Coating, Metals, Infrared radiation, Dielectrics

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Proceedings Article | 16 January 2019 Paper

Inert gas packaging of InGaAs detector with multistage thermoelectric cooler

De-feng Mo, Da-fu Liu, Li-yi Yang, Yang Wang, Tao Li, Xue Li

Proceedings Volume 10838, 108380W (2019) https://doi.org/10.1117/12.2505117

KEYWORDS: Packaging, Krypton, Nitrogen, Indium gallium arsenide, Sensors, Thermoelectric materials, Convection, Finite element methods

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Proceedings Article | 12 December 2018 Paper

Lateral collection structure for planar type InGaAs infrared detector

Honghai Deng, Zhiliang Wang, Jing Huang, Xue Li, Haimei Gong

Proceedings Volume 10846, 1084637 (2018) https://doi.org/10.1117/12.2505680

KEYWORDS: Sensors, Indium gallium arsenide, Infrared detectors, Diffusion, Signal detection, Infrared sensors, Sensor performance, Zinc, Short wave infrared radiation

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Proceedings Article | 24 October 2017 Paper

An optical nano-antenna structure of metallic ball array for enhancement of near-infrared photodetection

Pengfei Yao, Tao Li, Xue Li, Xiumei Shao, Haimei Gong

Proceedings Volume 10462, 104622Y (2017) https://doi.org/10.1117/12.2284991

KEYWORDS: Transmittance, Metals, Silver, Sensors, Coating, Near field optics, Near infrared, Photodetectors, Indium gallium arsenide, Antennas

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Proceedings Article | 24 October 2017 Paper

Performance of InGaAs/InP planar infrared detector with different passivation films

Honghai Deng, Haibao Shao, Bo Yang, Jing Huang, Zhiliang Wang, Xue Li, Xiumei Shao, Haimei Gong

Proceedings Volume 10462, 1046232 (2017) https://doi.org/10.1117/12.2285012

KEYWORDS: Infrared detectors, Indium gallium arsenide

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Proceedings Article | 7 September 2017 Presentation + Paper

Extended wavelength InGaAs SWIR FPAs with high performance

Xue Li, Tao Li, Chunlei Yu, Hengjing Tang, Shuangyan Deng, Xiumei Shao, Yonggang Zhang, Haimei Gong

Proceedings Volume 10404, 104040C (2017) https://doi.org/10.1117/12.2273550

KEYWORDS: Indium gallium arsenide, Short wave infrared radiation, Sensors, Infrared detectors, Etching, Image quality, Infrared astronomy, Infrared radiation, Infrared sensors, Astronomy

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Proceedings Article | 30 August 2017 Presentation + Paper

640x512 pixel InGaAs FPAs for short-wave infrared and visible light imaging

Xiumei Shao, Bo Yang, Songlei Huang, Yang Wei, Xue Li, Xianliang Zhu, Tao Li, Yu Chen, Haimei Gong

Proceedings Volume 10404, 104040D (2017) https://doi.org/10.1117/12.2273551

KEYWORDS: Indium gallium arsenide, Short wave infrared radiation, Visible radiation, Infrared imaging, Infrared radiation, Imaging systems, Safety, Defense and security

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Proceedings Article | 30 August 2017 Presentation + Paper

Life test of the InGaAs focal plane arrays detector for space applications

Xian-Liang Zhu, Hai-Yan Zhang, Xue Li, Zhang-Cheng Huang, Hai-Mei Gong

Proceedings Volume 10404, 104040E (2017) https://doi.org/10.1117/12.2273591

KEYWORDS: Indium gallium arsenide, Infrared detectors, Accelerated life testing, Staring arrays, Reliability, Sensors, Infrared radiation, Readout integrated circuits, Indium, Infrared detection

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Proceedings Article | 20 May 2016 Paper

Study on reflow process of SWIR FPA during flip-chip bonding technology

Cui Fan, Xue Li, Xiumei Shao, Zhijiang Zeng, Hengjing Tang, Tao Li, Haimei Gong

Proceedings Volume 9819, 98191A (2016) https://doi.org/10.1117/12.2223021

KEYWORDS: Oxidation, Indium, Staring arrays, Infrared radiation, Short wave infrared radiation, Oxides, Indium gallium arsenide, Humidity, Photodiodes, Nitrogen

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Proceedings Article | 20 May 2016 Paper

Crosstalk study of near infrared InGaAs detectors

Xue Li, Hengjing Tang, Tao Li, Cui Fan, Xiumei Shao, Jianwei Li, Jun Wei, Haimei Gong

Proceedings Volume 9819, 98192A (2016) https://doi.org/10.1117/12.2222736

KEYWORDS: Indium gallium arsenide, Photodiodes, Modulation transfer functions, Sensors, Staring arrays, Diffusion, Near infrared, Absorption, Back illuminated sensors, Signal detection

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Proceedings Article | 15 October 2015 Paper

The influence of thermal treatment on the passivation of SiNx film and the dark current of p-i-n InGaAs detector

Gaoqi Cao, Hengjing Tang, Xiumei Shao, Rui Wang, Qingfa Li, Jifeng Cheng, Tao Li, Xue Li, Haimei Gong

Proceedings Volume 9674, 967411 (2015) https://doi.org/10.1117/12.2199226

KEYWORDS: Diodes, Indium gallium arsenide, Diffusion, Sensors, Plasma enhanced chemical vapor deposition, Annealing, Silicon, Silicon films, Short wave infrared radiation, Semiconductors

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Proceedings Article | 15 October 2015 Paper

Simulation and optimization of p-i-n In0.53Ga0.47As/InP photodetector

Min Zhu, Jun Chen, Jiabing Lv, Hengjing Tang, Xue Li

Proceedings Volume 9674, 96742D (2015) https://doi.org/10.1117/12.2201032

KEYWORDS: Absorption, Photodetectors, Doping, Sensors, Instrument modeling, Infrared radiation, Indium gallium arsenide, Infrared photography, Infrared imaging, Infrared sensors

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Proceedings Article | 15 October 2015 Paper

Research of mesa type extended wavelength 64x64 In0.83Ga0.17As detector

Shuangyan Deng, Ping Li, Tao Li, Xue Li, Xiumei Shao, Hengjing Tang, Haimei Gong

Proceedings Volume 9674, 967420 (2015) https://doi.org/10.1117/12.2199826

KEYWORDS: Sensors, Indium gallium arsenide, Indium, Infrared radiation, Etching, Infrared detectors, Short wave infrared radiation, Infrared sensors, Plasma, Interference (communication)

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Proceedings Article | 13 April 2015 Paper

Performance of four-stage thermoelectric cooler for extended wavelength InGaAs detectors

De-feng Mo, Li-yi Yang, Da-fu Liu, Qin-fei Xu, Tao Li, Xue Li

Proceedings Volume 9522, 95221Y (2015) https://doi.org/10.1117/12.2180247

KEYWORDS: Thermoelectric materials, Staring arrays, Sensors, Indium gallium arsenide, Packaging, Convection, Lithium, Nitrogen, Surgery, Resistance

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Proceedings Article | 13 April 2015 Paper

Study on the relationship of dark current characteristics and materials surface defects of extended wavelength InGaAs photodiodes

Hongzhou Yan, Hengjing Tang, Shuangyan Deng, Gang Chen, Xiumei Shao, Tao Li, Xue Li, Haimei Gong

Proceedings Volume 9522, 95221X (2015) https://doi.org/10.1117/12.2180244

KEYWORDS: Indium gallium arsenide, Photodiodes, Sensors, Infrared radiation, Metalorganic chemical vapor deposition, Physics, Lithium, Infrared imaging, Temperature metrology, Polarization

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Proceedings Article | 19 February 2015 Paper

Optimization and analysis of near-infrared InGaAs detectors

Qingsong Wang, Jun Chen, Jiabing Lv, Mingxiang Wang, Xue Li, Hengjing Tang

Proceedings Volume 9449, 94491Q (2015) https://doi.org/10.1117/12.2083191

KEYWORDS: Sensors, Indium gallium arsenide, Photodetectors, Back illuminated sensors, Metalorganic chemical vapor deposition, Infrared sensors, Infrared imaging, Infrared radiation, Absorption, Etching

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Proceedings Article | 20 November 2014 Paper

InGaAs p-i-n detectors with different cap layers

Peng Wei, Xue Li, Hengjing Tang, Haimei Gong

Proceedings Volume 9300, 930013 (2014) https://doi.org/10.1117/12.2071312

KEYWORDS: Doping, Sensors, Indium gallium arsenide, Quantum efficiency, Resistance, Diffusion, Aluminum, Photodiodes, Gallium, Interfaces

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Proceedings Article | 7 October 2014 Paper

The influence of sunlight irradiation on the characteristics of InGaAs detectors

Xiumei Shao, Yaoming Zhu, Xue Li, Hengjing Tang, Tao Li, Haimei Gong

Proceedings Volume 9220, 92200A (2014) https://doi.org/10.1117/12.2059173

KEYWORDS: Sensors, Indium gallium arsenide, Signal detection, Short wave infrared radiation, Electrons, Visible radiation, Black bodies, Infrared sensors, Semiconducting wafers, Absorption

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Proceedings Article | 7 October 2014 Paper

Study on 512×128 pixels InGaAs near infrared focal plane arrays

Xue Li, Hengjing Tang, Songlei Huang, Xiumei Shao, Tao Li, Zhangcheng Huang, Haimei Gong

Proceedings Volume 9220, 92200B (2014) https://doi.org/10.1117/12.2060304

KEYWORDS: Indium gallium arsenide, Diffusion, Near infrared, Readout integrated circuits, Staring arrays, Detector arrays, Photodiodes, Interference (communication), Sensors, Indium

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Proceedings Article | 2 September 2014 Paper

Performance of extended wavelength InGaAs/InAsP SWIR detector

Gaoqi Cao, Tao Li, Hengjing Tang, Xiumei Shao, Xue Li, Haimei Gong

Proceedings Volume 9284, 928406 (2014) https://doi.org/10.1117/12.2069755

KEYWORDS: Sensors, Black bodies, Short wave infrared radiation, Temperature metrology, Signal detection, Indium gallium arsenide, Interference (communication), Gallium arsenide, Infrared sensors, Interfaces

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Proceedings Article | 2 September 2014 Paper

Research on polarizing performance of Au-SiO2 sub-wavelength hybrid grating in short wave infrared (SWIR)

Wang Rui, Tao Li, Xiumei Shao, Xue Li, Haimei Gong

Proceedings Volume 9284, 928403 (2014) https://doi.org/10.1117/12.2069791

KEYWORDS: Transmittance, Silica, Metals, Short wave infrared radiation, Dielectric polarization, Optical design, Infrared radiation, Finite-difference time-domain method, Gold, Nanowires

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Proceedings Article | 24 June 2014 Paper

Extended wavelength InGaAs infrared detector arrays based on three types of material structures grown by MBE

Haimei Gong, Xue Li, Tao Li, Hengjing Tang, Ming Shi, Xiumei Shao, Yonggang Zhang

Proceedings Volume 9070, 90700C (2014) https://doi.org/10.1117/12.2048583

KEYWORDS: Sensors, Indium gallium arsenide, Infrared detectors, Etching, Detector arrays, Absorption, Silicon, Fabrication, Materials processing, Temperature metrology

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Proceedings Article | 21 May 2014 Paper

Performance of near-infrared InGaAs focal plane array with different series resistances to p-InP layer

Xiumei Shao, Xue Li, Tao Li, Zhangcheng Huang, Yu Chen, Hengjing Tang, Haimei Gong

Proceedings Volume 9100, 910010 (2014) https://doi.org/10.1117/12.2048629

KEYWORDS: Sensors, Indium gallium arsenide, Staring arrays, Readout integrated circuits, Resistance, Diffusion, Annealing, Particle filters, Metals, Temperature metrology

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Proceedings Article | 21 May 2014 Paper

Responsivity performance of extended wavelength InGaAs shortwave infrared detector arrays

Tao Li, Shuang-yan Deng, Xue Li, Xiu-mei Shao, Heng-jing Tang, Hai-mei Gong

Proceedings Volume 9100, 91000U (2014) https://doi.org/10.1117/12.2050242

KEYWORDS: Indium gallium arsenide, Sensors, Diffusion, Detector arrays, Black bodies, Epitaxy, Infrared detectors, Shortwaves, Temperature metrology, Doping

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Proceedings Article | 7 March 2014 Paper

The novel dual-waveband SWIR InGaAs FPAs with monolithic integration filter microstructure

Heng-jing Tang, Xue Li, Yunji Wang, Weibo Duan, Xiumei Shao, Hai-mei Gong

Proceedings Volume 8982, 898229 (2014) https://doi.org/10.1117/12.2042837

KEYWORDS: Indium gallium arsenide, Sensors, Optical filters, Photodiodes, Short wave infrared radiation, Optical properties, Interference (communication), Fabry–Perot interferometers, Staring arrays, Imaging systems

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Proceedings Article | 11 September 2013 Paper

Study on dark current of extended wavelength InGaAs detectors

Xue Li, Hengjing Tang, Tao Li, Peng Wei, Haimei Gong, Jiaxiong Fang

Proceedings Volume 8907, 890703 (2013) https://doi.org/10.1117/12.2034986

KEYWORDS: Sensors, Indium gallium arsenide, Absorption, Short wave infrared radiation, Plasma enhanced chemical vapor deposition, Temperature metrology, Etching, Indium, Lithium, Infrared imaging

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Proceedings Article | 9 July 2013 Paper

Effect of laser conditioning on the LIDT of 532nm HfO2/SiO2 thin films reflectors

Jie Liu, Xu Li, Zhenkun Yu, Hui Cui, Weili Zhang, Meiping Zhu, Kui Yi

Proceedings Volume 8786, 87860Z (2013) https://doi.org/10.1117/12.2020439

KEYWORDS: Thin films, Laser induced damage, Reflectors, Laser damage threshold, Raster graphics, Resistance, Thin film coatings, Electron beams, Laser energy, Laser irradiation

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