Prof. Xuefeng Yang Profile

Prof. Xuefeng Yang

at Henan Polytechnic Univ

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Author

Publications (4)

Proceedings Article | 15 February 2022 Paper

Projecting uniformity subwavelength pattern by plasmonic lithography with unidirectional surface plasmon coupler

Shuxia Zhang, Baoji Wang, Xiaolin Cai, Qin Wang, Weiyang Yu, Xiaohua Li, Erguang Jia, Yingying Zhu, Xuefeng Yang

Proceedings Volume 12166, 121660N (2022) https://doi.org/10.1117/12.2605592

KEYWORDS: Waveguides, Nanolithography, Surface plasmons, Lithography

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SPIE Journal Paper | 7 May 2019

Subwavelength interference nanolithography based on metallic–insulator–metallic waveguide with a trapezoid metallic nanoslit coupler

Shuxia Zhang, Xuefeng Yang, Weiyang Yu, Baoji Wang, Xiaolin Cai, Liwei Zhang, Xiaohua Li, Xingtao Jia, Jian Wang, Xiaoxia Zhao

JNP, Vol. 13, Issue 02, 026006, (May 2019) https://doi.org/10.1117/12.10.1117/1.JNP.13.026006

KEYWORDS: Waveguides, Nanolithography, Lithography, Aluminum, Photoresist materials, Wave propagation, Surface plasmon polaritons, Lithium, Metals, Optical lithography

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SPIE Journal Paper | 17 October 2013

Near-field Moiré effect with dielectric–metal–dielectric sandwich structure

Shuxia Zhang, Shuai Liu, Xuefeng Yang, Changtao Wang, Xiangang Luo

JNP, Vol. 7, Issue 01, 073080, (October 2013) https://doi.org/10.1117/12.10.1117/1.JNP.7.073080

KEYWORDS: Dielectrics, Silver, Metals, Visibility, Near field, Near field optics, Chromium, Wave propagation, Polymethylmethacrylate, Optical metrology

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SPIE Journal Paper | 8 August 2013

Subwavelength interference lithography based on a unidirectional surface plasmon coupler

Xuefeng Yang, Shuxia Zhang, Dao Hua Zhang, Yueke Wang, Jian Wang

OE, Vol. 52, Issue 08, 086109, (August 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.8.086109

KEYWORDS: Lithography, Aluminum, Surface plasmons, Interfaces, Surface plasmon polaritons, Optical lithography, Nanolithography, Diffraction, Nanostructures, Metals

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