Typical damage features of the silica films, prepared by the sol-gel and e-beam deposition methods, are investigated and compared under the irradiation of the single nanosecond pulse. The laser induced damage threshold of the sol-gel silica film is higher than that of e-beam deposited silica coating. The concentric surface structures are observed in all damage pits. Furthermore, the large scale mechanical delamination that is not from the film-substrate interface but from the inner of the film is interesting for the sol-gel silica coating, which is distinct from the explosive boiling that observed on the surface of the coating deposited by the e-beam deposition method.
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