Dr. Ying Yan Profile

Dr. Ying Yan

at Dalian Univ of Technology

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Publications (2)

Proceedings Article | 30 August 2022 Paper

Effect of viscous film on electrochemical polishing of copper microstructures

Chao Zhang, Ping Zhou, Ying Yan, Dongming Guo

Proceedings Volume 12309, 123091E (2022) https://doi.org/10.1117/12.2645714

KEYWORDS: Copper, Polishing, Surface finishing, Ions, Corrosion, Surface roughness, Resistance, Metals, Diffusion, Electrochemical etching

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Proceedings Article | 21 June 2019 Paper

Surface roughness measurement accuracy analysis of grinded silicon wafer by white light scanning interferometry (WLSI)

Linjie Zhao, Ping Zhou, Ying Yan, Qian Bai, YiQi Wang, Dongming Guo

Proceedings Volume 11056, 110562B (2019) https://doi.org/10.1117/12.2525241

KEYWORDS: Silicon, Semiconducting wafers, Error analysis, Objectives, Phase shifts, Interferometry, Atomic force microscopy, Analytical research, Interferometers, Modulation

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