Unspecified Yingfang Wang Profile

Yingfang Wang

at HFC Semiconductor Corp

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Publications (1)

Proceedings Article | 28 April 2023 Poster + Paper

Co-optimization of optical and resist models in the OPC modeling process using in-house genetic algorithm

Yinuo Pan, Yingfang Wang, Norman Chen, Keeho Kim, Eric Parent

Proceedings Volume 12495, 124951Q (2023) https://doi.org/10.1117/12.2657959

KEYWORDS: Optical proximity correction, Mathematical optimization, Modeling, Model-based design, Genetic algorithms, Process modeling, Photoresist processing, Semiconducting wafers, Overfitting, Wafer-level optics

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