Dr. Yiyang Jenny Wang Profile

Dr. Yiyang Jenny Wang

at IBM Corp

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Publications (2)

Proceedings Article | 24 May 2004 Paper

Mask line monitor: process improvements and yield learning

Yiyang Wang, Andrew Watts

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.536773

KEYWORDS: Inspection, Manufacturing, Etching, Image processing, Photoresist processing, Opacity, Yield improvement, Defect detection, Defect inspection, Standards development

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Proceedings Article | 17 December 2003 Paper

Migration of 90-nm mask and wafer lithography learning into 130-nm mask production to improve performance and yield

Andrew Watts, Yiyang Wang, Jed Rankin

Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.517877

KEYWORDS: Photomasks, Lithography, Semiconducting wafers, Yield improvement, Manufacturing, Critical dimension metrology, Image processing, Mask making, Reactive ion etching, Etching

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