We introduce new technologies improving the PLD (Pulsed Laser Deposition) method to fabricate visible (370 ~ 600 nm) and NUV (Near Ultraviolet, 185 ~ 320 nm) photocathodes for IIT (Image Intensifier Tube) sensors. The multi-purpose PLD VC (Vacuum Chamber) by utilizing optical window viewports and a couple of internal carousels can do the whole process of the laser deposition of various alkalis, including the measurement the QE (Quantum Efficiency) in-situ, for multiple photocathode targets. Then, we have integrated a Load/Degassing/Assembly (LDA) VC to the PLD VC, to prepare, load, degas, and assemble the alkali targets and the photocathode substrates. With these facilities, we have manufactured high QE photocathodes free from oxidation and water vapor contamination during the process. In this paper, we describe detail procedures of our new technologies to make S20 and CsTe photocathodes for visual and NUV wavelengths respectively, and discuss about the test results of the IIT products.
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