CONFERENCE PROCEEDINGS
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Youbao Zhang
at Shanghai Institute of Optics and fine Mechanics
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Publications (5)
SPIE Journal Paper | 18 March 2020
Telecentricity measurement for exposure system of photolithography tools
OE, Vol. 59, Issue 03, 034109, (March 2020) https://doi.org/10.1117/12.10.1117/1.OE.59.3.034109
KEYWORDS: Semiconducting wafers, Optical lithography, Lithography, Photoresist materials, Optical engineering, Photomasks, Fiber optic illuminators, Sensors, Lithographic illumination, Overlay metrology
Proceedings Article | 10 February 2017 Paper
Design and implementation of a cloud based lithography illumination pupil processing application
Youbao Zhang, Xinghua Ma, Jing Zhu, Fang Zhang, Huijie Huang
Proceedings Volume 10250, 102501Z (2017) https://doi.org/10.1117/12.2266903
KEYWORDS: Lithographic illumination, Clouds, Lithography
Proceedings Article | 5 August 2015 Paper
Accurate measurement of illumination uniformity using spot sensor based 2-dimension scanning method
Chengke Xie, Ming Chen, Youbao Zhang, Xinghua Ma, Baoxi Yang, Huijie Huang
Proceedings Volume 9621, 96210O (2015) https://doi.org/10.1117/12.2192536
KEYWORDS: Sensors, Lithographic illumination, Fiber optic illuminators, Excimer lasers, Lithography, Deep ultraviolet, Laser applications, Pulsed laser operation, CCD cameras, Critical dimension metrology
Proceedings Article | 28 January 2009 Paper
Improvement of up-converting phosphor technology-based biosensor
Chengke Xie, Lihua Huang, Youbao Zhang, Xiaoxian Guo, Jianfeng Qu, Huijie Huang
Proceedings Volume 7156, 71561H (2009) https://doi.org/10.1117/12.805654
KEYWORDS: Biosensors, Signal processing, Signal detection, Control systems, Particles, Particle filters, Interfaces, Image filtering, Phosphorescence, Control systems design
Proceedings Article | 28 January 2009 Paper
Scattering performance analysis of reflectance photometer for quantifying gold labeled test strips
Lihua Huang, Youbao Zhang, Chengke Xie, Jianfeng Qu, Huijie Huang, Xiangzhao Wang
Proceedings Volume 7156, 71561O (2009) https://doi.org/10.1117/12.806529
KEYWORDS: Particles, Gold, Scattering, Photometry, Reflectivity, Light scattering, Absorption, Scanning electron microscopy, Mie scattering, Transmittance
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