Dr. Yuan Gan Profile

Dr. Yuan Gan

at Dongfang Jingyuan Electron Ltd

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Author

Publications (3)

Proceedings Article | 10 April 2024 Presentation + Paper

A novel flow of full-chip OPC model calibration and verification by utilizing SEM image contours

Yuan Gan, Changlian Yan, Mengqing Yu, Penghui Zhu, Jing Qiao, Lile Lu, Shengrui Zhang, Ming Ding, Chunying Han, Weijie Shi, Xiaojun Luo, Junhai Jiang, Zongchang Yu

Proceedings Volume 12954, 129540K (2024) https://doi.org/10.1117/12.3010034

KEYWORDS: Optical proximity correction, Calibration, Contour modeling, Scanning electron microscopy, Data modeling, Data acquisition, Contour extraction, Image quality, Critical dimension metrology, Process modeling

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Proceedings Article | 10 April 2024 Poster + Paper

Innovative wafer defect inspection mode: self-adaptive pattern to pattern inspection

Changlian Yan, Jing Qiao, Yuan Gan, Nuo Ding, Zhao Chen, Ming Ding, Xiaojun Luo, Junhai Jiang, Zongchang Yu, ChunYing Han

Proceedings Volume 12955, 129552E (2024) https://doi.org/10.1117/12.3010013

KEYWORDS: Inspection, Design, Defect detection, Defect inspection, Scanning electron microscopy, Manufacturing

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Proceedings Article | 28 April 2023 Poster + Paper

Improving FEM wafer review efficiency by introducing different pattern grouping modes

Yuan Gan, Changlian Yan, Rongjia Zhang, Ming Ding, Chunying Han, Junhai Jiang, Zongchang Yu

Proceedings Volume 12495, 124951L (2023) https://doi.org/10.1117/12.2656632

KEYWORDS: Scanning electron microscopy, Semiconducting wafers, Inspection, Design and modelling, Tunable filters, Defect detection, Optical lithography, Optical proximity correction, Wafer inspection, Design for manufacturing

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