CONFERENCE PROCEEDINGS
Advanced Search
Yue-Jhe Tsai
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 15 August 2023 Paper
Development of a full-field polarization interferometer for measurement of wafer surface profile
Proceedings Volume 12618, 1261835 (2023) https://doi.org/10.1117/12.2678117
KEYWORDS: Polarization, Semiconducting wafers, Cameras, Interferometry, Interferometers, Fizeau interferometers, Polarized light, Phase shifts, Manufacturing
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top