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Yumei Liu
at Carleton Univ
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Publications (1)
Proceedings Article | 20 December 2004 Paper
CMOS-compatible polysilicon MSM photodetector for 1550-nm light
Yumei Liu, N. Garry Tarr, Andrew Knights
Proceedings Volume 5577, (2004) https://doi.org/10.1117/12.567094
KEYWORDS: Photodetectors, Electrodes, Silicon, Raman spectroscopy, Crystals, Electronics, External quantum efficiency, Low pressure chemical vapor deposition, Hydrogen, Waveguides
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