Dr. Yun Li Profile

Dr. Yun Li

at Institute of Optics and Electronics CAS

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Author

Publications (5)

Proceedings Article | 24 September 2015 Paper

Absolute testing of flats in sub-stitching interferometer by rotation-shift method

Xin Jia, Fuchao Xu, Weimin Xie, Yun Li, Tingwen Xing

Proceedings Volume 9628, 962819 (2015) https://doi.org/10.1117/12.2191288

KEYWORDS: Interferometers, Testing and analysis, Control systems, Error analysis, Zernike polynomials, Humidity, Environmental sensing, Optical testing, Zoom lenses, Active isolation

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Proceedings Article | 16 October 2012 Paper

Preferential sputtering of Ar ion processing SiO2 mirror

Guping Duan, Tingwen Xing, Yun Li

Proceedings Volume 8416, 84162L (2012) https://doi.org/10.1117/12.973697

KEYWORDS: Sputter deposition, Ions, Silicon, Ion beams, Argon, Silica, Chemical species, Mirrors, Solids, Tin

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Proceedings Article | 16 November 2011 Paper

The machining precision analysis of the ion beam figuring system

Tingwen Xing, Yun Li, Xin Jia, Jiajun Xu

Proceedings Volume 8321, 83210N (2011) https://doi.org/10.1117/12.903773

KEYWORDS: Ion beams, Ions, Error analysis, Motion models, Photovoltaics, Computing systems, Computer simulations, Error control coding, Control systems, Optical components

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Proceedings Article | 7 October 2010 Paper

Filter model based dwell time algorithm for ion beam figuring

Yun Li, Tingwen Xing

Proceedings Volume 7655, 76551K (2010) https://doi.org/10.1117/12.866144

KEYWORDS: Ion beam finishing, Ion beams, Spatial frequencies, Ions, Deconvolution, Gaussian filters, Computer simulations, Photovoltaics, Fourier transforms, Defense technologies

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Proceedings Article | 2 April 2010 Paper

Error analysis of absolute testing based on even-odd functions method

Xin Jia, Tingwen Xing, Wumei Lin, Zhijie Liao, Yun Li

Proceedings Volume 7638, 76383E (2010) https://doi.org/10.1117/12.848202

KEYWORDS: Error analysis, Interferometers, Zernike polynomials, Optical spheres, Motion analysis, Metrology, MATLAB, Optical testing, Lithography, Optical fabrication

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