Mr. YunZhe Shao Profile

YunZhe Shao

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Publications (3)

Proceedings Article | 10 April 2024 Presentation + Paper

EUV scatterometry: low-dose characterization of polymer-based metamaterials

Nicholas Jenkins, Yuka Esashi, Yunzhe Shao, Michael Tanksalvala, Henry Kapteyn, Margaret Murnane, Matthew Atkinson

Proceedings Volume 12955, 1295513 (2024) https://doi.org/10.1117/12.3009911

KEYWORDS: Extreme ultraviolet, Polymers, Diffraction, Scatterometry, Reflectometry, Metamaterials, Scanning transmission electron microscopy, Biological samples, Charge-coupled devices, Statistical modeling

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Proceedings Article | 27 April 2023 Presentation + Paper

Multi-modal tabletop EUV reflectometry for characterization of nanostructures

Yuka Esashi, Nicholas Jenkins, Michael Tanksalvala, Yunzhe Shao, Brendan McBennett, Joshua Knobloch, Henry Kapteyn, Margaret Murnane

Proceedings Volume 12496, 1249614 (2023) https://doi.org/10.1117/12.2658543

KEYWORDS: Reflectometry, Extreme ultraviolet, Nanostructures, Diffraction, Surface roughness, Metrology, Phase retrieval, High harmonic generation, Chemical composition

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Proceedings Article | 1 December 2022 Presentation + Paper

Robust and reliable actinic ptychographic imaging of highly periodic structures in EUV photomasks

Bin Wang, Nathan Brooks, Michael Tanksalvala, Yuka Esashi, Nicolas Jenkins, Peter Johnsen, Iona Binnie, Guan Gui, YunZhe Shao, Margaret Murnane, Henry Kapteyn

Proceedings Volume 12293, 122930D (2022) https://doi.org/10.1117/12.2641726

KEYWORDS: Extreme ultraviolet, Photomasks, Diffraction, Imaging systems, Microscopes, High harmonic generation, Phase retrieval, Reticles

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