Dr. Yunbo Liu Profile

Dr. Yunbo Liu

Sr. Design Engineer at ASML

SPIE Involvement:

Author

Publications (12)

Proceedings Article | 10 April 2024 Presentation

Presentation

Computational lithography and patterning evaluation to support EUV high-NA stitching

Cyrus Tabery, Jiuning Hu, Rongkuo Zhao, Christoph Hennerkes, Stephen Hsu, Yunbo Liu, Natalia Davydova, Victor Blanco, Vincent Wiaux

Proceedings Volume PC12953, PC129530M (2024) https://doi.org/10.1117/12.3012722

KEYWORDS: Optical lithography, Reticles, Extreme ultraviolet, Process control, Critical dimension metrology, Computational lithography, Design and modelling, Optical proximity correction, Imaging systems, Tantalum

Read Abstract +

Proceedings Article | 12 March 2024 Paper

Paper

Long-time nanoscopic bioimaging by phase-intensity nanoscopy

Guangjie Cui, Yunbo Liu, Di Zu, Do Young Kim, Somin Eunice Lee

Proceedings Volume 12852, 1285204 (2024) https://doi.org/10.1117/12.3005868

KEYWORDS: Super resolution microscopy, Plasmonics, Scattered light, Modulation, Polymers, Phase modulation, Super resolution, Sensors

Read Abstract +

Proceedings Article | 28 April 2023 Paper

Paper

Computational lithography solutions to support EUV high-NA patterning

Rongkuo Zhao, Fan Zhou, Jialei Tang, Jeff Lu, Yunbo Liu, Dezheng Sun, Ming-Chun Tien, Stephen Hsu, Rachit Gupta, Youping Zhang, Joerg Zimmermann

Proceedings Volume 12495, 124950R (2023) https://doi.org/10.1117/12.2660858

KEYWORDS: Source mask optimization, SRAF, Light sources and illumination, Extreme ultraviolet, 3D mask effects, Image quality, Computational lithography

Read Abstract +

Proceedings Article | 9 March 2022 Presentation

Presentation

Miniaturized integrative polarizer system for autonomous glare removal

Henry Do, Xintao Zhao, Ancheng Da, John Gregg, Yunbo Liu, Somin Eunice Lee

Proceedings Volume PC12019, PC120190S (2022) https://doi.org/10.1117/12.2609936

KEYWORDS: System integration, Polarizers, Visibility, Unmanned vehicles, Safety, Enhanced vision

Read Abstract +

Proceedings Article | 10 March 2021 Presentation

Presentation

Remote control of CRISPR nanoplasmonic carriers

Zhijia Zhang, Guangjie Cui, Yunbo Liu, Xintao Zhao, Somin Eunice Lee

Proceedings Volume 11659, 1165911 (2021) https://doi.org/10.1117/12.2578394

KEYWORDS: Nanoparticles, Safety, Gold

Read Abstract +

Proceedings Article | 9 March 2021 Presentation

Presentation

Spatiotemporal quantification of actin dynamics by non-bleaching nanoscale imaging

Xintao Zhao, Di Zu, Guangjie Cui, Yunbo Liu, Ancheng Da, John Gregg, Somin Eunice Lee

Proceedings Volume 11658, 1165807 (2021) https://doi.org/10.1117/12.2578378

KEYWORDS: Visualization, Proteins, Image resolution, Cell mechanics

Read Abstract +

Proceedings Article | 9 March 2021 Presentation

Presentation

Multimodal super-resolution nanoimaging & nanomanipulation of plasmonic nanoparticles

Yunbo Liu, Zhijia Zhang, Guangjie Cui, Xintao Zhao, Somin Eunice Lee

Proceedings Volume 11661, 116610H (2021) https://doi.org/10.1117/12.2578362

KEYWORDS: Super resolution, Temporal resolution, Spatial resolution, Plasmonics, Nanoparticles, Luminescence

Read Abstract +

Proceedings Article | 8 March 2021 Presentation

Presentation

Super-resolution manipulation & imaging of plasmonic CRISPR-Cas9

Guangjie Cui, Zhijia Zhang, Xintao Zhao, Yunbo Liu, Somin Eunice Lee

Proceedings Volume 11659, 1165912 (2021) https://doi.org/10.1117/12.2578389

KEYWORDS: Nanoplasmonics, Nanoparticles, Gold, Viruses, Toxicity, Target recognition, Optical properties, Near infrared

Read Abstract +

Proceedings Article | 8 March 2021 Presentation

Presentation

Nanoplasmonic drill for optical injection

Ancheng Da, Jacob Krach, Yanan Chu, Yunbo Liu, Somin Eunice Lee

Proceedings Volume 11661, 116610N (2021) https://doi.org/10.1117/12.2578373

KEYWORDS: Nanoplasmonics, Particles, Nanoparticles, Gold

Read Abstract +

Proceedings Article | 21 February 2020 Paper

Paper

High signal-to-noise, non-bleaching imaging with plasmonic nanoparticles

Yunbo Liu, Somin Eunice Lee

Proceedings Volume 11254, 1125408 (2020) https://doi.org/10.1117/12.2546362

KEYWORDS: Polarization, Signal to noise ratio, Nanoparticles, Plasmonics, Polarizers, Nanorods, Nanoimaging

Read Abstract +

Proceedings Article | 23 February 2018 Presentation + Paper

Presentation + Paper

High-speed nano-polarimetry for real-time plasmonic bio-imaging

Yipei Wang, Yunbo Liu, Xintao Zhao, Somin Eunice Lee

Proceedings Volume 10509, 1050908 (2018) https://doi.org/10.1117/12.2289144

KEYWORDS: Polarization, Polarizers, Plasmonics, Polarimetry, Nanoimaging, Nanoparticles, Nanorods, Wave plates, Liquid crystals

Read Abstract +

Proceedings Article | 20 February 2018 Presentation + Paper

Presentation + Paper

High spatial precision nano-imaging of polarization-sensitive plasmonic particles

Yunbo Liu, Yipei Wang, Somin Eunice Lee

Proceedings Volume 10506, 105060F (2018) https://doi.org/10.1117/12.2289143

KEYWORDS: Polarizers, Nanorods, Polarization, Nanoparticles, Nanoimaging, Liquid crystals, Imaging systems, Gold, Polarimetry, Plasmonics

Read Abstract +

Showing 5 of 12 publications

SIGN IN TO:

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Advertisement

Advertisement