Mr. Zachary Bogusz Profile

Zachary Bogusz

Research Scientist at EMD Electronics

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 20 March 2012 Paper

Combinatorial process optimization for negative photo-imageable spin-on dielectrics and investigation of post-apply bake and post-exposure bake interactions

Jihoon Kim, Ruzhi Zhang, Elizabeth Wolfer, Bharatkumar Patel, Medhat Toukhy, Zachary Bogusz, Tatsuro Nagahara

Proceedings Volume 8325, 83252A (2012) https://doi.org/10.1117/12.916453

KEYWORDS: Dielectrics, Lithography, Semiconducting wafers, Critical dimension metrology, Polymers, Photoresist materials, Image processing, Coating, Semiconductor manufacturing, Photoresist developing

Read Abstract +

Proceedings Article | 16 April 2011 Paper

EUV underlayer materials for 22nm HP and beyond

Huirong Yao, Zachary Bogusz, Jianhui Shan, Joonyeon Cho, Salem Mullen, Guanyang Lin, Mark Neisser

Proceedings Volume 7972, 797212 (2011) https://doi.org/10.1117/12.881639

KEYWORDS: Extreme ultraviolet, Electron beam lithography, Extreme ultraviolet lithography, Absorption, Line width roughness, Semiconducting wafers, Lithography, Polymers, Etching, Contamination

Read Abstract +

Proceedings Article | 1 April 2009 Paper

Chemically amplified hybrid resist platform for i-line applications

Medhat Toukhy, Margareta Paunescu, Zachary Bogusz, Georg Pawlowski

Proceedings Volume 7273, 72730J (2009) https://doi.org/10.1117/12.816044

KEYWORDS: Polymers, Copper, Silicon, Coating, Photoresist processing, Gold, Fourier transforms, Plating, Chemistry, Semiconducting wafers

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years