Dr. Zelalem Belete Profile

Dr. Zelalem Belete

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Publications (1)

Proceedings Article | 18 September 2024 Paper

Modeling of multi-trigger resists

Thiago dos Santos, Zelalem Belete, Andreas Erdmann, Alex P. Robinson, Carmen Popescu, Alexandra McClelland

Proceedings Volume 13273, 1327308 (2024) https://doi.org/10.1117/12.3027941

KEYWORDS: Photoresist materials, Line width roughness, Extreme ultraviolet lithography, Calibration, Lithography, Critical dimension metrology, Photoresist developing, Computational lithography

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