In recent years, integrated optical phased array (iOPA) devices have gained significant attention due to their remarkable precision in shaping light beam, essential for various applications such as free space optical communication, lidar, AR/VR, and biomedical imaging. However, a notable technological gap remains for visible light applications, as silicon (Si)-technology is only transparent above 1.1 μm, does not support visible spectrum. This study addresses this challenge by introducing a platform that is suitable for visible spectrum. Our technology operates with the wideband visible spectrum (405-660 nm) through the monolithic integration of silicon nitride (Si3N4) waveguide membrane and thin-film Lead-Zirconate Titanate (PZT) based PiezoMEMS. This technology will lay the groundwork for future advancements in areas that require precise light beam shaping at the visible spectrum, including microscopy, sensing, diagnosis, and manufacturing.
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