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Zixian Chen
at Tsinghua Univ Shenzhen International Graduate School
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Publications (1)
Proceedings Article | 20 November 2024 Paper
Simulation of bilayer gratings: exploring the impact of structural parameters on applications
Sze Hian Tan, Shuonan Shan, Tianshi Lu, Xinghui Li
Proceedings Volume 13244, 132440B (2024) https://doi.org/10.1117/12.3036343
KEYWORDS: Diffraction gratings, Optical gratings, Diffraction, Lithium, Overlay metrology, Fabrication, Spectroscopy, Polarization gratings, Nickel, Finite-difference time-domain method
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