Mr. Daisuke Tei Profile

Daisuke Tei

at Gigaphoton Inc

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Author

Publications (3)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi light source

Takehiko Tomonaga, Tukasa Hori, Daisuke Tei, Taku Yamazaki, Tommy Oga

Proceedings Volume 11613, 116130S (2021) https://doi.org/10.1117/12.2583755

KEYWORDS: Light sources, Light, Semiconductors, Semiconducting wafers, Optical alignment, New and emerging technologies

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Proceedings Article | 20 November 2019 Paper

Laser-induced damage threshold by high pulse repetition rate ArF excimer laser radiation

Takahito Kumazaki, Daisuke Tei, Masakazu Hattori, Yousuke Fujimaki, Junichi Fujimoto, Hakaru Mizoguchi

Proceedings Volume 11173, 1117307 (2019) https://doi.org/10.1117/12.2536268

KEYWORDS: Excimer lasers, Laser applications, Pulsed laser operation, Light sources, Coating, Laser damage threshold, Laser development, Laser induced damage, Lithography, Semiconductors

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Proceedings Article | 16 November 2018 Presentation + Paper

Laser-induced damage and defect analysis of calcium fluoride window caused by the high pulse repetition rate of ArF excimer laser radiation

Daisuke Tei, Masakazu Hattori, Takahito Kumazaki, Yasutsugu Usami, Junichi Fujimoto, Hakaru Mizoguchi

Proceedings Volume 10805, 108050H (2018) https://doi.org/10.1117/12.2326657

KEYWORDS: Excimer lasers, Microscopes, Surface finishing, Crystals, Calcium, Digital image correlation, Atomic force microscopy, Optical components, Laser scattering, Laser induced damage

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