Firstly, in this paper, a reasonable process flow is designed and the surface roughness of each procedure is tested. Secondly, the influences of particle size distribution of slurry on the quality of super smooth surface are studied, and then the conclusions are obtained that large span distribution of slurry will lead to surface scratches. Lastly, the effects of aging and ratios of polishing pad on the quality of super smooth surface are researched, and then some specific process parameters are gained such as shaving cycle and asphalt ratios in different environments.
This paper introduces the general requirements of parameter indexes about sphere output mirror with large radius curvature mainly including: sphere radius,spherical area,coaxiality,surface defect disease,RMS value and so on. The difficulties that ultra-smooth machining for sphere output mirror were indicated. A “plano-convex” structure has been designed for transition chip to solving the problem that roughcast and tool pad can’t directly processed by the matrix angles using optical cement method. Based on the sphere output mirror’s process feature, the processing plan to polish sphere surface and then to process platform was laid down. The purpose of this article is to control the test process to get to the target of the “transition chip” method by using “the design and produce of transition chip”,“the conservation of super smooth” and the “control process”, after testing on relative indicators of sphere output mirror, it prove that “transition chip” method can be applied to sipper smooth polish in sphere output mirror with large radius of curvature.
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