Mr. Zong Qing Wu Profile

Zong Qing Wu

at Soochow Univ

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Proceedings Article | 31 January 2023 Paper

Study on immersion grating used in weak carbon dioxide band detection spectrometer

Bin Huang, Quan Liu, Nenghua Zhou, Zongqing Wu

Proceedings Volume 12505, 1250520 (2023) https://doi.org/10.1117/12.2665406

KEYWORDS: Diffraction gratings, Diffraction, Carbon monoxide, Spectroscopy, Optical design, Spectral resolution

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The imaging spectrometer monitoring the CO₂ content in the atmosphere is mainly divided into the weak CO₂ band and the strong CO₂ band. Compared with the strong CO₂ band, the weak CO₂ band has a relatively clean spectrum, less interference from water vapor and other gases, and weaker CO₂ absorption, and the instrument can receive stronger groundreflected solar radiation signals. However, the concentration of CO₂ in the atmosphere is low. To use this band to detect changes in CO₂ concentration, it is necessary to ensure that the detection instrument has a sufficiently high spectral resolution. Using the immersion grating as the dispersive element in the spectrometer can greatly reduce the size and weight of the instrument while achieving high spectral resolution. In this paper, the quartz immersion grating used in the weak CO₂ detector is optimized and designed, the groove parameters of the grating are designed and optimized according to the requirements of the weak CO₂ detector used, and the rectangle and different bottom angles are designed and optimized in consideration of the actual production error. In the 1.595-1.625 μm band, the duty cycle of the rectangular groove is 0.3-0.35, the groove depth is 560-630 nm, and the TiO₂ thickness is 110-120 nm, the diffraction efficiency of the grating is higher than 80%; the duty ratio is 0.4-0.45, When the groove depth is 590-660 nm and the TiO₂ thickness is 100-105 nm, the diffraction efficiency of the grating is higher than 80%. When the duty ratio of the trapezoidal groove is 0.3-0.35, the bottom angle of the trapezoid is 82°-86°, the groove depth is 590-630 nm, and the TiO₂ thickness is 120-125 nm, the diffraction efficiency of the grating is higher than 80%. When the duty ratio of the trapezoidal groove is 0.4-0.45, the bottom angle of the trapezoid is 82°-86°, the groove depth is 620-670 nm, and the thickness of TiO₂ is 105 nm, the diffraction efficiency of the grating is higher than 80%.

Proceedings Article | 9 October 2021 Poster + Paper

Study on the immersion grating with dielectric film

Zongqing Wu, Quan Liu, Jinchao Lu, Nenghua Zhou, Bin Huang

Proceedings Volume 11898, 1189820 (2021) https://doi.org/10.1117/12.2602757

KEYWORDS: Diffraction gratings, Diffraction, Spectroscopy, Refractive index, Polarization, Prisms, Atomic layer deposition

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Imaging spectrometer is an important optical instrument for monitoring the content of carbon dioxide (CO2) in the atmosphere. Using an immersion grating as the dispersive element in the spectrometer can significantly reduce the size of the grating while maintaining the same spectral resolution. The immersion grating with dielectric film is one of the key elements in greenhouse gases imaging spectrometer. In this paper, the quartz immersed grating was designed for weak CO₂ band. The rectangular groove structure with high refractive index dielectric film was designed in consideration of possible fabrication errors. In the 1.595 ~ 1.625 μm band, the duty cycle of the rectangular groove is 0.3 to 0.35, the thickness of TiO₂ is 110 to 125 nm, and the grating groove depth is 560 to 640 nm, the diffraction efficiency can reach more than 80%. When the duty cycle is 0.4~0.45, the TiO₂ thickness is 95~105 nm, and the grating groove depth is 570~700 nm, the diffraction efficiency can reach more than 80%. For the trapezoidal groove, when the duty cycle is 0.3~0.35, the bottom angle of the trapezoid is 82°~86°, the thickness of TiO₂ is 120~125 nm, and the grating groove depth is 565~620 nm, the diffraction efficiency can reach more than 80%. When the thickness of TiO₂ is 115~120 nm, the overall degree of polarization is less than 0.1.The immersed grating with the period of 697nm in a quartz substrate of 245 mm × 138mm will be fabricated by holographic lithography - ion beam etching in late 2021. The TiO₂ film will be deposited by atomic layer deposition.

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