Commentaries

Commentary: Femtosecond-laser nanolithography for photonic applications

[+] Author Affiliations
Hiroaki Nishiyama

Division of Materials and Manufacturing Science, Osaka University, Graduate School of Engineering, Suita, Osaka 565-0871 Japan

J. Nanophoton. 3(1), 030301 (February 19, 2009). doi:10.1117/1.3097264
History: Received February 9, 2009; Revised February 12, 2009; Accepted February 12, 2009; February 19, 2009; Online February 19, 2009
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Abstract

A short technical commentary on a specific topic.

References

S. Maruo, O. Nakamura, and S. Kawata, "Three-dimensional microfabrication with two-photon-absorbed photopolymerization," Opt. Lett. 22, 132-134 (1997)
S. Kawata, H. B. Sun, T. Tanaka, and K. Takada, "Finer features for functional microdevices," Nature 412, 697-698 (2001)
S. Juodkazis, V. Mizeikis, K. K. Seet, M. Miwa, and H. Misawa, "Two-photon lithography of nanorods in SU-8 photoresist," Nanotechnol. 16, 846-849 (2005)
S. Matsui, T. Kaito, J. Fujita, M. Komuro, K. Kanda, and Y. Haruyama, "Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition," J. Vac. Sci. Technol. B 18, 3181-3184 (2000)
V. Mizeikis, S. Juodkazis, R. Tarozaite, J. Juodkazyte, K. Juodkazis, and H. Misawa, "Fabrication and properties of metalo-dielectric photonic crystal structures for infrared spectral region," Opt. Exp. 15, 8454-8464 (2007)
N. Tetreault, G. von Freymann, M. Deubel, M. Hermatschweiler, F. Perez-Willard, S. John, M. Wegener, and G. A. Ozin, "New route to three-dimensional photonic bandgap materials: Silicon double inversion of polymer templates," Adv. Mater. 18, 457-460 (2006)
S. A. Rinne, F. Garcia-Santamaria, and P. V. Braun, "Embedded cavities and waveguides in three-dimensional silicon photonic crystals," Nature Photon. 2, 52-56 (2008)
H. Nishiyama, M. Mizoshiri, T. Kawahara, J. Nishii, and Y. Hirata, "SiO2-based nonplanar structures fabricated using femtosecond laser lithography," Opt. Exp. 16, 17288-17294 (2008)
M. Mizoshiri, H. Nishiyama, T. Kawahara, J. Nishii, and Y. Hirata, "SiO2-based hybrid diffractive-refractive lenses fabricated by femtosecond laser-assisted micromachining," Appl. Phys. Exp. 1, 127001 (2008)
C. N. LaFratta, T. Baldacchini, R. A. Farrer, J. T. Fourkas, M. C. Teich, B. E. A. Saleh, and M. J. Naughton, "Replication of two-photon-polymerized structures with extremely high aspect ratios and large overhangs," J. Phys. Chem. B 108, 11256-11258 (2004)
© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Hiroaki Nishiyama
"Commentary: Femtosecond-laser nanolithography for photonic applications", J. Nanophoton. 3(1), 030301 (February 19, 2009). ; http://dx.doi.org/10.1117/1.3097264


Figures

Tables

References

S. Maruo, O. Nakamura, and S. Kawata, "Three-dimensional microfabrication with two-photon-absorbed photopolymerization," Opt. Lett. 22, 132-134 (1997)
S. Kawata, H. B. Sun, T. Tanaka, and K. Takada, "Finer features for functional microdevices," Nature 412, 697-698 (2001)
S. Juodkazis, V. Mizeikis, K. K. Seet, M. Miwa, and H. Misawa, "Two-photon lithography of nanorods in SU-8 photoresist," Nanotechnol. 16, 846-849 (2005)
S. Matsui, T. Kaito, J. Fujita, M. Komuro, K. Kanda, and Y. Haruyama, "Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition," J. Vac. Sci. Technol. B 18, 3181-3184 (2000)
V. Mizeikis, S. Juodkazis, R. Tarozaite, J. Juodkazyte, K. Juodkazis, and H. Misawa, "Fabrication and properties of metalo-dielectric photonic crystal structures for infrared spectral region," Opt. Exp. 15, 8454-8464 (2007)
N. Tetreault, G. von Freymann, M. Deubel, M. Hermatschweiler, F. Perez-Willard, S. John, M. Wegener, and G. A. Ozin, "New route to three-dimensional photonic bandgap materials: Silicon double inversion of polymer templates," Adv. Mater. 18, 457-460 (2006)
S. A. Rinne, F. Garcia-Santamaria, and P. V. Braun, "Embedded cavities and waveguides in three-dimensional silicon photonic crystals," Nature Photon. 2, 52-56 (2008)
H. Nishiyama, M. Mizoshiri, T. Kawahara, J. Nishii, and Y. Hirata, "SiO2-based nonplanar structures fabricated using femtosecond laser lithography," Opt. Exp. 16, 17288-17294 (2008)
M. Mizoshiri, H. Nishiyama, T. Kawahara, J. Nishii, and Y. Hirata, "SiO2-based hybrid diffractive-refractive lenses fabricated by femtosecond laser-assisted micromachining," Appl. Phys. Exp. 1, 127001 (2008)
C. N. LaFratta, T. Baldacchini, R. A. Farrer, J. T. Fourkas, M. C. Teich, B. E. A. Saleh, and M. J. Naughton, "Replication of two-photon-polymerized structures with extremely high aspect ratios and large overhangs," J. Phys. Chem. B 108, 11256-11258 (2004)

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