A Nd:YAG laser (third harmonic, 355 nm, 3.49 eV, 4.7 ns; EKSPLA, NL301), 10-Hz repetitive rate was used for the ablation of the AZO target (Kurt J. Lesker, Pittsburgh, 99.99% purity, 98% ZnO + 2wt. % ) in a stainless steel vacuum chamber. Corning glass slides (Corning #26003, Ted Pella Inc., California) and PC (Goodfellow Ls401316, Huntingdon, England) substrates with the dimension of were ultrasonically cleaned and placed at 5-cm distance from the target. The deposition chamber was first evacuated to , and gas was subsequently introduced into the chamber to obtain the partial pressure of 2.1 Pa for thin film deposition. The laser beam was focused to a size of , and this resulted in laser fluences from 1 to . The laser beam was steered by a motorized mirror to raster an area of on the target during ablation, while the target and substrates were fixed in position. The films were deposited for 54,000 pulses at room temperature. No postgrowth annealing was performed. The thickness of the films was measured by using a stylus profilometer, whereas the structural, optical, and electrical properties of the films were characterized by using x-ray diffraction (XRD) with line at (Bruker, Massachusetts, D5000), UV-vis-NIR spectrophotometer (AvaLight-DHc and Oceanoptics S2000), four-point probe (Keithley 236 and probe station, Ohio), atomic force microscopy (Nanosurf, Liestal, Switzerland), and scanning electron microscope (Hitachi, Tokyo, Japan).