Research Papers

Numerical study on an optical waveguide cantilever sensor

[+] Author Affiliations
Guofang Fan

Beijing Jiaotong University, Institute of Lightwave Technology, Key Laboratory of All Optical Network and Advanced Telecommunication Network of Ministry of Education, Beijing, China

Yuan Li, Lihua Lei

Shanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology, Shanghai, China

Chunguang Hu

Tianjin University, State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin, China

Hongyu Li

Shandong University of Science and Technology, College of Mechanical and Electronic Engineering, Qingdao, China

J. Nanophoton. 11(2), 026007 (May 12, 2017). doi:10.1117/1.JNP.11.026007
History: Received December 27, 2016; Accepted April 24, 2017
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Abstract.  An optical waveguide cantilever sensor is introduced, which is determined by monitoring the coupling efficiency between a waveguide cantilever and a waveguide receptor through the cantilever bending. A straightforward model is developed for an optical waveguide cantilever sensor, in which the coupling efficiency between the cantilever and receptor is calculated using the overlap integral. An effective index is introduced to analyze the thickness of input/output waveguides and cantilever for a maximum coupling with a fiber keeping the single-mode operation. The relationship of the optical waveguide sensor (cantilever, gap, and output waveguide) and the sensitivity is presented. As a consequence, we take an optical waveguide cantilever sensor structure of Si3N4/SiO2/Si as an example, and an optimized design is reported. Moreover, the analysis model is compared with a finite-difference beam propagation method. The result means that our model has a similar accuracy but is more simple, intuitive, and time-saving.

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© 2017 Society of Photo-Optical Instrumentation Engineers

Topics

Sensors ; Waveguides

Citation

Guofang Fan ; Yuan Li ; Chunguang Hu ; Lihua Lei and Hongyu Li
"Numerical study on an optical waveguide cantilever sensor", J. Nanophoton. 11(2), 026007 (May 12, 2017). ; http://dx.doi.org/10.1117/1.JNP.11.026007


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