Orthogonal crossed gratings fabricated by scanning Dammann lithography

Minkang Li; Changhe Zhou; Chunlong Wei; Wei Jia; Xiansong Xiang; Shiyao Zhu; Fantao Bu; Yunkai Lu

doi:10.1117/12.2500281

8 November 2018 Orthogonal crossed gratings fabricated by scanning Dammann lithography

Minkang Li, Changhe Zhou, Chunlong Wei, Wei Jia, Xiansong Xiang, Shiyao Zhu, Fantao Bu, Yunkai Lu

Proceedings Volume 10818, Holography, Diffractive Optics, and Applications VIII; 108180V (2018) https://doi.org/10.1117/12.2500281
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

Orthogonal crossed gratings, or two-dimensional (2D) gratings are key optical elements in plane optical encoders. In this paper, Scanning Dammann lithography (SDL) was implemented to fabricate gold-coated 2D gratings by stepping and scanning a 2D air-bearing stage and rotating Dammann gratings. A displacement measurement interferometer (DMI) was applied to monitor the 2D stage which ensured the positioning accuracy of exposing. A series of experiments by varying the exposure dose were conducted. The atomic force microscope (AFM) results indicted the duty cycle changed with the exposure dose. A 2D gold-coated grating with a size 100*100mm was also fabricated. Since it is straightforward to extend the size of the substrate up to hundreds of millimeters, SDL is a promising method to fabricate large-sized 2D gratings with controllable duty cycle.

Citation Download Citation

Minkang Li, Changhe Zhou, Chunlong Wei, Wei Jia, Xiansong Xiang, Shiyao Zhu, Fantao Bu, and Yunkai Lu "Orthogonal crossed gratings fabricated by scanning Dammann lithography", Proc. SPIE 10818, Holography, Diffractive Optics, and Applications VIII, 108180V (8 November 2018); https://doi.org/10.1117/12.2500281

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