New source of energetic neutral particles

Hermann R. Dobler

doi:10.1117/12.192117

4 November 1994 New source of energetic neutral particles

Hermann R. Dobler

Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192117
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

We present a new tool for coating technology. Based on the known saddle field source we developed an improved neutral particle source for particle energies equivalent up to a few hundred eV. The desired energy can be selected by the operation mode. The energetic particles are neutrals. Therefore no problems arise with electric charging or with electrically caused absorption. The principal construction of the source is described. The main advantages are: no filament, no magnetic field, only dc high voltage, resistant to reactive gases.

Citation Download Citation

Hermann R. Dobler "New source of energetic neutral particles", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192117

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available