Micropump technology and applications

Frank T. Hartley

doi:10.1117/12.364470

29 September 1999 Micropump technology and applications

Frank T. Hartley

Proceedings Volume 3891, Electronics and Structures for MEMS; (1999) https://doi.org/10.1117/12.364470
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

This paper describes reversed engineered biological peristaltics through the insightful evolution of MEMS technology. While the emphasis on pump applications is in the miniaturization of spacecraft bus and payload, terrestrial applications are evident. For spacecraft propulsion, the use of the peristaltic pump as a low leakage valve, a pressure regulator and a flow meter are discussed. Spacecraft stabilization is addressed through a fluidic reaction wheel while thermal management of spacecraft, flight instruments and lander is addressed through heat pumps and Joule-Thompson compressors.

Citation Download Citation

Frank T. Hartley "Micropump technology and applications", Proc. SPIE 3891, Electronics and Structures for MEMS, (29 September 1999); https://doi.org/10.1117/12.364470

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